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Integrated Ferroelectrics
An International Journal
Volume 10, 1995 - Issue 1-4
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Materials processing—MOD and SOL-GEL

Preparation and electrical properties of high quality PZT thin films on RuOx electrode

Wan In Lee Materials & Device Research Center, Samsung Advanced Institute of Technology, P. O. Box 111, Suwon, Kyungki, 440-600, Korea
,
J. K. Lee Materials & Device Research Center, Samsung Advanced Institute of Technology, P. O. Box 111, Suwon, Kyungki, 440-600, Korea
,
J. S. Lee Materials & Device Research Center, Samsung Advanced Institute of Technology, P. O. Box 111, Suwon, Kyungki, 440-600, Korea
&
I. K. Yoo Materials & Device Research Center, Samsung Advanced Institute of Technology, P. O. Box 111, Suwon, Kyungki, 440-600, Korea
Pages 145-154 | Received 22 Mar 1995, Published online: 19 Aug 2006

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