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Integrated Ferroelectrics
An International Journal
Volume 12, 1996 - Issue 2-4
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Session IV: Thin films

Effects of oxidants on the deposition and dielectric properties of the SrTiO3 thin films prepared by liquid source metal-organic chemical vapor deposition (MOCVD)

Cheol Seong Hwang Samsung Electronics Co., Ltd., Semiconductor R&D center, San #24, Nongseo-Ri, Kiheung-Eup, Yongin-Si, Kyungki-Do, 449-900, Korea
,
Chang Seok Kang Samsung Electronics Co., Ltd., Semiconductor R&D center, San #24, Nongseo-Ri, Kiheung-Eup, Yongin-Si, Kyungki-Do, 449-900, Korea
,
Hag-Ju Cho Samsung Electronics Co., Ltd., Semiconductor R&D center, San #24, Nongseo-Ri, Kiheung-Eup, Yongin-Si, Kyungki-Do, 449-900, Korea
,
Soon Oh Park Samsung Electronics Co., Ltd., Semiconductor R&D center, San #24, Nongseo-Ri, Kiheung-Eup, Yongin-Si, Kyungki-Do, 449-900, Korea
,
Byoung Taek Lee Samsung Electronics Co., Ltd., Semiconductor R&D center, San #24, Nongseo-Ri, Kiheung-Eup, Yongin-Si, Kyungki-Do, 449-900, Korea
,
Jin Won Kim Samsung Electronics Co., Ltd., Semiconductor R&D center, San #24, Nongseo-Ri, Kiheung-Eup, Yongin-Si, Kyungki-Do, 449-900, Korea
,
Hideki Horii Samsung Electronics Co., Ltd., Semiconductor R&D center, San #24, Nongseo-Ri, Kiheung-Eup, Yongin-Si, Kyungki-Do, 449-900, Korea
,
Sang In Lee Samsung Electronics Co., Ltd., Semiconductor R&D center, San #24, Nongseo-Ri, Kiheung-Eup, Yongin-Si, Kyungki-Do, 449-900, Korea
&
Moon Yong Lee Samsung Electronics Co., Ltd., Semiconductor R&D center, San #24, Nongseo-Ri, Kiheung-Eup, Yongin-Si, Kyungki-Do, 449-900, Korea
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Pages 199-213 | Received 27 May 1996, Published online: 19 Aug 2006

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