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Integrated Ferroelectrics
An International Journal
Volume 16, 1997 - Issue 1-4
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Drams

A review of high dielectric materials for DRAM capacitors

David E. Kotecki IBM Microelectronics Division, Hopewell Junction, New York, USA
Pages 1-19 | Received 18 Mar 1996, Published online: 19 Aug 2006

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