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Integrated Ferroelectrics
An International Journal
Volume 16, 1997 - Issue 1-4
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Device intergration issues and testing

Characterization of self-patterned SrBi2Ta2O9 thin films from photo-sensitive solutions

H. Uchida Central Research Institute, Mitsubishi Mateials Corporation, 1-297 Kitabukuro-cho, Omiya, Saitama, 330, Japan
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N. Soyama Central Research Institute, Mitsubishi Mateials Corporation, 1-297 Kitabukuro-cho, Omiya, Saitama, 330, Japan
,
K. Kageyama Central Research Institute, Mitsubishi Mateials Corporation, 1-297 Kitabukuro-cho, Omiya, Saitama, 330, Japan
,
K. Ogi Central Research Institute, Mitsubishi Mateials Corporation, 1-297 Kitabukuro-cho, Omiya, Saitama, 330, Japan
,
M. C. Scott Symetrix Corporation, 5055 Mark Dabling Blvd., Suite 100, Colorado Springs, CO, 80918, USA
,
J. D. Cuchiaro Symetrix Corporation, 5055 Mark Dabling Blvd., Suite 100, Colorado Springs, CO, 80918, USA
,
G. F. Derbenwick Symetrix Corporation, 5055 Mark Dabling Blvd., Suite 100, Colorado Springs, CO, 80918, USA
,
L. D. Mcmillan Symetrix Corporation, 5055 Mark Dabling Blvd., Suite 100, Colorado Springs, CO, 80918, USA
&
C. A. Paz De Araujo Symetrix Corporation, 5055 Mark Dabling Blvd., Suite 100, Colorado Springs, CO, 80918, USA
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Pages 41-52 | Received 18 Mar 1996, Published online: 19 Aug 2006

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