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Integrated Ferroelectrics
An International Journal
Volume 14, 1997 - Issue 1-4
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Materials processing - CVD

In-situ growth of Pb(Zr0.5Ti0.5)O3/RuO2 heterostructures on Si(001) using low-temperature metal-organic chemical vapor deposition

C. M. Foster Materials Science Division, Argonne National Laboratory, 9700 S. Cass Avenue, Argonne, IL, 60439, USA
,
G.-R. Bai Materials Science Division, Argonne National Laboratory, 9700 S. Cass Avenue, Argonne, IL, 60439, USA
,
A. Wang Materials Science Division, Argonne National Laboratory, 9700 S. Cass Avenue, Argonne, IL, 60439, USA
,
J. Vetrone Materials Science Division, Argonne National Laboratory, 9700 S. Cass Avenue, Argonne, IL, 60439, USA
,
Y. Huang Materials Science Division, Argonne National Laboratory, 9700 S. Cass Avenue, Argonne, IL, 60439, USA
&
R. Jammy Materials Science Division, Argonne National Laboratory, 9700 S. Cass Avenue, Argonne, IL, 60439, USA
Pages 23-31 | Received 18 Mar 1996, Published online: 19 Aug 2006

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