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Integrated Ferroelectrics
An International Journal
Volume 14, 1997 - Issue 1-4
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Materials processing - CVD

Pulsed laser ablation synthesis and characterization of layered SrBi2Ta2O9 films and integration into capacitors for non-volatile memories

D. Thomas North Carolina State University, Department of Materials Science and Engineering, Raleigh, NC, 27695-7919
,
A. I. Kingon North Carolina State University, Department of Materials Science and Engineering, Raleigh, NC, 27695-7919
,
O. Auciello MCNC, Electronic Technologies Division, Research Triangle Park, 3021 Cornwallis Rd, NC, 27709-2889
,
R. Waser Institute für Werkstoffe der Elektrotechnik, RWTH Aachen University of Technology, Aachen, Germany
&
M. Schumacher Institute für Werkstoffe der Elektrotechnik, RWTH Aachen University of Technology, Aachen, Germany
Pages 51-57 | Received 18 Mar 1996, Published online: 19 Aug 2006

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