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Integrated Ferroelectrics
An International Journal
Volume 21, 1998 - Issue 1-4
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Session 1. Device Integration Issues

Sr2(Ta, Nb)2O7 ferroelectric thin film for ferroelectric memory FET

Yoshikazu Fujimori ROHM CO., LTD., 21, Saiin Mizosaki–cho, Ukyo–ku, Kyoto, 615-8585, Japan
,
Naoki Izumi ROHM CO., LTD., 21, Saiin Mizosaki–cho, Ukyo–ku, Kyoto, 615-8585, Japan
,
Takashi Nakamura ROHM CO., LTD., 21, Saiin Mizosaki–cho, Ukyo–ku, Kyoto, 615-8585, Japan
&
Akira Kamisawa ROHM CO., LTD., 21, Saiin Mizosaki–cho, Ukyo–ku, Kyoto, 615-8585, Japan
Pages 73-82 | Received 02 Apr 1998, Published online: 19 Aug 2006

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