Journal of Information Display
Volume 25, 2024 - Issue 3
Open access
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Articles
Compositional tailoring of indium-free GZO layers via plasma-enhanced atomic layer deposition for highly stable IGZO/GZO TFT
Hye-Jin Oha Division of Materials Science and Engineering, Hanyang University, Seoul, Republic of Korea
https://orcid.org/0000-0002-9637-4474View further author information
Yoon-Seo Kima Division of Materials Science and Engineering, Hanyang University, Seoul, Republic of Korea
https://orcid.org/0000-0001-8446-5523View further author information
Hyun-Jun Jeonga Division of Materials Science and Engineering, Hanyang University, Seoul, Republic of Korea;b R&D Center, Samsung Display, Yongin, Republic of Korea
https://orcid.org/0000-0001-6419-4420View further author information
Sunhee Leeb R&D Center, Samsung Display, Yongin, Republic of KoreaView further author information
, Joon Seok Parkb R&D Center, Samsung Display, Yongin, Republic of KoreaCorrespondence[email protected]
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& View further author information
Jin-Seong Parka Division of Materials Science and Engineering, Hanyang University, Seoul, Republic of KoreaCorrespondence[email protected]
https://orcid.org/0000-0002-9070-5666View further author information
Pages 295-303
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Received 20 Sep 2023, Accepted 28 Nov 2023, Published online: 15 Dec 2023
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