Open access
393
Views
0
CrossRef citations to date
0
Altmetric
Research Article
Anomaly detection of semiconductor processing equipment using equipment behaviour
Toshiya Hiraia Kokusai Electric Corporation, Tokyo, Japan;c Graduate School of Informatics, Department of Systems Science, Kyoto University, Kyoto, JapanCorrespondence[email protected] [email protected]
https://orcid.org/0009-0006-0407-3671
Yuki Shigab Kokusai Electric Corporation Toyama Technology & Manufacturing Center, Toyama, Japan
, Mitsuru Shimizub Kokusai Electric Corporation Toyama Technology & Manufacturing Center, Toyama, Japan
, Eiji Imurab Kokusai Electric Corporation Toyama Technology & Manufacturing Center, Toyama, Japan
& Manabu Kanoc Graduate School of Informatics, Department of Systems Science, Kyoto University, Kyoto, Japan
https://orcid.org/0000-0002-2325-1043
Pages 332-337
|
Received 17 Jul 2023, Accepted 31 Oct 2023, Published online: 13 Nov 2023
Reprints and Permissions
This is an open access article distributed under the terms of the Creative Commons CC BY license, which permits unrestricted use, distribution, reproduction in any medium, provided the original work is properly cited.
You are not required to obtain permission to reuse this article in part or whole.
Related research
People also read lists articles that other readers of this article have read.
Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.
Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.