High sensitive NH₃ sensor based on electrochemically etched porous silicon

B.A. Khaniyev1 Department of Physics and Technology, Al-Farabi Kazakh University, KazakhstanCorrespondence[email protected]
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Y. Sagidolda1 Department of Physics and Technology, Al-Farabi Kazakh University, Kazakhstan

K.K. Dikhanbayev1 Department of Physics and Technology, Al-Farabi Kazakh University, KazakhstanView further author information

A.O. Tileu1 Department of Physics and Technology, Al-Farabi Kazakh University, KazakhstanView further author information

M.K. Ibraimov1 Department of Physics and Technology, Al-Farabi Kazakh University, Kazakhstan

Mohamed M. Rashad2 Central Metallurgical Research and Development Institute, Electronic and Magnetic Materials, Cairo, EgyptView further author information

(Reviewing editor)

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