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Advances in Materials and Processing Technologies Volume 2, 2016 - Issue 1
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Articles

Seed layer effect on the (0 0 2) texture and piezoelectric properties of pulsed-DC sputtered AlN thin films

M. HasheminiasariSchool of Metallurgy and Materials Engineering, Iran University of Science and Technology (IUST), Tehran, IranCorrespondence[email protected]
&
J. LinDepartment of Metallurgical and Materials Engineering, Colorado School of Mines, Golden, CO, USA
Pages 66-72 | Published online: 23 Mar 2016

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