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Ferroelectrics Volume 264, 2001 - Issue 1
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Session J: Optical properties and non-linear phenomena

Optical properties of PECVD TEOS-SiO2 Films

Chien-kang Kao National Tsing-Hua University, 101 Sec. 2 Kuang Fu Rd., Hsinchu, Taiwan
,
Hsun Chang National Tsing-Hua University, 101 Sec. 2 Kuang Fu Rd., Hsinchu, Taiwan
,
Wee-Yih Lim National Tsing-Hua University, 101 Sec. 2 Kuang Fu Rd., Hsinchu, Taiwan
,
Chuen-Horng Tsai National Tsing-Hua University, 101 Sec. 2 Kuang Fu Rd., Hsinchu, Taiwan
,
Cheng-Chung Chi National Tsing-Hua University, 101 Sec. 2 Kuang Fu Rd., Hsinchu, Taiwan
,
Nyan-Hwa Tai National Tsing-Hua University, 101 Sec. 2 Kuang Fu Rd., Hsinchu, Taiwan
&
I-Nan Lin National Tsing-Hua University, 101 Sec. 2 Kuang Fu Rd., Hsinchu, Taiwan
 show all
Pages 291-296 | Received 03 Aug 2001, Published online: 16 Mar 2011

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