Leakage Current Mechanisms in Rapid Thermal Annealed LiTaO₃ Thin Films Prepared by a Diol-Based Sol-Gel Method

MING-CHENG KAO Department of Electrical Engineering National Sun Yat-Sen University, Kaohsiung, Taiwan, R.O.C.

YING-CHUNG CHEN Department of Electrical Engineering National Sun Yat-Sen University, Kaohsiung, Taiwan, R.O.C.

HONE-ZERN CHEN Department of Electrical Engineering Hsiuping Institute of Technology, Taichung, Taiwan, R.O.C.

CHIH-MING WANG Department of Electrical Engineering Cheng-Shiu Institute of Technology, Kaohsiung, Taiwan, R.O.C.

YI-JU LI Department of Electrical Engineering National Sun Yat-Sen University, Kaohsiung, Taiwan, R.O.C.

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Leakage Current Mechanisms in Rapid Thermal Annealed LiTaO₃ Thin Films Prepared by a Diol-Based Sol-Gel Method

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Leakage Current Mechanisms in Rapid Thermal Annealed LiTaO₃ Thin Films Prepared by a Diol-Based Sol-Gel Method