Preparation of ZnO Thin Film on Diamond-Like Carbon/Si Substrate by RF Magnetron Sputtering for Surface Acoustic Wave Application

References

• Shikata , S. , Nakahata , H. , Higaki , K. , Hachigo , A. and Fujimori , N. Proceedings of IEEE Ultrasonic Symposium . pp. 277
   Google Scholar
• Wu , T. T. and Chen , Y. Y. 2002 . Exact analysis of dispersive SAW devices on ZnO/diamond/Si-layered structures . IEEE Trans. Ultrason., Ferroelect., and Freq. Contr. , 49 : 142
   PubMedGoogle Scholar
• Benetti , M. D. , Cannata , D. , Pietrantonio , F. D. and Verona , E. Growth of AlN piezoelectric films on diamond for high frequency SAW devices . Proceedings of IEEE Ultrasonic Symposium . pp. 1738
   Google Scholar
• Beckmann , R. , Sobisch , B. and Kulisch , W. 1995 . On the gas-phase mechanisms in MWCVD and HFCVD diamond deposition . Diamond Relat. Mater. , 4 : 256
   Google Scholar
• Muller , J. , Antoni , F. , Fogarassy , E. and Normand , F. L. 1998 . HFCVD diamond nucleation and growth on DLC carbon films obtained by laser ablation . Carbon , 36 : 565
   Google Scholar
• Johnson , C. E. 1994 . Surf. Coatings Technol. , 68–69 : 374
   Google Scholar
• Erdemir , A. , Fenske , G. R. , Krauss , A. R. , Gruen , D. M. , McCauley , T. and Csencsits , R. T. 1999 . Tribological properties of nanocrystalline diamond films . Surf. Coatings Technol. , 120–121 : 565
   Web of Science ®Google Scholar
• Lopez , J. M. , Gordillo-Vazquez , F. J. and Albella , J. M. 2002 . Nanocrystalline diamond thin films deposited by 35 kHz Ar-rich plasmas . Appl. Surf. Sci. , 185 : 321
   Web of Science ®Google Scholar
• Nakahata , H. , Hachigo , A. , Shikata , S. and Fujimori , N. High frequency surface acoustic wave filter using ZnO/diamond/Si structure . Proceedings of IEEE Ultrasonic Symposium . pp. 377
   Google Scholar
• Nakahata , H. , Higaki , K. , Fujii , S. , Hachigo , A. , Kitabayashi , H. , Tanabe , K. , Seki , Y. and Shikata , S. SAW devices on diamond . Proceedings of IEEE Ultrasonic Symposium . pp. 361
   Google Scholar
• Fujii , S. , Shikata , S. , Uemura , T. , Nakahata , H. and Harima , H. 2005 . Effect of crystalline quality of diamond film to the propagation loss of surface acoustic wave devices . IEEE Trans. Ultrason., Ferroelect. Freq. Contr. , 52 : 1817
   PubMed Web of Science ®Google Scholar
• Robertson , J. 1992 . Properties of diamond-like carbon . Surf. Coatings Technol. , 50 : 185
   Web of Science ®Google Scholar
• Lifshitz , Y. 1996 . Hydrogen-free amorphous carbon films: correlation between growth conditions and properties . Diamond Relat. Mater. , 5 : 388
   Web of Science ®Google Scholar
• Clay , K. J. , Speakman , S. P. , Morrison , N. A. , Tomozeiu , N. , Milne , W. I. and Kapoor , A. 1998 . Material properties and tribological performance of rf-PECVD deposited DLC coatings . Diamond Relat. Mater. , 7 : 1100
   Google Scholar
• Li , L. , Zhang , H. , Zhang , Y. , Chu , P. K. , Tian , X. , Xia , L. and Ma , X. 2002 . Structural analysis of arc deposited diamond-like carbon films by Raman and X-ray photoelectron spectroscopy . Mater. Sci. Eng. , B94 : 95
   Google Scholar
• Choi , S. S. , Kim , D. W. , Joe , J. W. , Moon , J. H. , Park , K. C. and Jang , J. 1997 . Deposition of diamondlike carbon films by plasma enhanced chemical vapour deposition . Mater. Sci. Eng. , B46 : 133
   Google Scholar
• Ohtake , N. , Saito , T. , Kondo , Y. , Hosono , S. , Nakamura , Y. and Imanishi , Y. I. 2004 . Synthesis of diamond-like carbon flms by nanopulse plasma chemical vapor deposition at subatmospheric pressure . Jpn. J. Appl. Phys. , 43 : L1406
   Google Scholar
• Sanchez , N. A. , Rincon , C. , Zambrano , G. , Galindo , H. and Prieto , P. 2000 . Characterization of diamond-like carbon (DLC) thin films prepared by r.f. magnetron sputtering . Thin Solid Films , 373 : 247
   Google Scholar
• Nakazawa , H. , Mikami , T. , Enta , Y. , Suemitsu , M. and Mashita , M. 2003 . Structure, chemical bonding and these thermal stabilities of diamond-like carbon (DLC) films by RF magnetron sputtering . Jpn. J. Appl. Phys. , 42 : L676
   Google Scholar
• Bewilogua , K. , Wittorf , R. , Thomsen , H. and Weber , M. 2004 . DLC based coatings prepared by reactive d.c. magnetron sputtering . Thin Solid Films , 447 : 112
   Google Scholar
• Tang , I. T. , Wang , Y. C. , Hwang , W. C. , Hwang , C. C. , Wu , N. C. , Houng , M. P. and Wang , Y. H. 2003 . Investigation of piezoelectric ZnO film deposited on diamond like carbon coated onto Si substrate under different sputtering conditions . J. Cryst. Growth , 252 : 190
   Google Scholar
• Tang , I. T. , Chen , H. J. , Hwang , W. C. , Wang , Y. C. , Houng , M. P. and Wang , Y. H. 2004 . Applications of piezoelectric ZnO film deposited on diamond-like carbon coated onto Si substrate under fabricated diamond SAW filter . J. of Cryst. Growth , 262 : 461
   Web of Science ®Google Scholar
• Zhgoon , S. , Zhang , Q. , Yoon , S. F. , Revkov , A. , Gan , B. and Rusli , J. A. 2000 . Surface acoustic waves in diamond-like carbon films on LiNbO3 . Diamond Relat. Mater. , 9 : 1430
   Google Scholar
• Zhang , Q. , Yoon , S. F. , Zhgoon , S. , Ligatchev , V. , Rusli , J. A. and Sun , Z. 2001 . Speeding-up effects of hard carbon films on surface acoustic wave on crystalline quartz . Thin Solid Films , 397 : 276
   Google Scholar
• Meunier , C. , Munnik , F. , Germann , E. , Schluechter , R. , Pujol , M. D. , Kondratiev , S. N. and Mikhailov , S. 2004 . DLC films on LiTaO3 for SAW devices . Surf. Coatings Technol. , 180–181 : 234
   Google Scholar
• Shiosaki , T. , Mikamura , Y. , Takeda , F. and Kawabata , A. 1986 . High-coupling and high-velocity SAW using ZnO and AlN films on a glass substrate. IEEE Trans . Ultrason., Ferroelect. Freq. Contr. , 33 : 324
   PubMedGoogle Scholar
• Shimizu , M. , Kamei , H. , Tanizawa , M. , Shiosaki , T. and Kawabata , A. 1988 . Low temperature growth of ZnO film by photo-MOCVD . J. Cryst. Growth , 89 : 365
   Google Scholar
• Shih , W. C. , Wu , M. S. , Shimizu , M. and Shiosaki , T. 1993 . The effect of an SiO2 buffer layer on the SAW properties of ZnO/SiO2/GaAs structure . IEEE Trans. Ultrason., Ferroelect. Freq. Contr. , 40 : 642
   PubMedGoogle Scholar
• Shih , W. C. and Wu , M. S. 1994 . Growth of ZnO films on GaAs substrates with a SiO2 buffer layer by RF planar magnetron sputtering for surface acoustic wave applications . J. Cryst. Growth , 137 : 319
   Google Scholar
• Liu , D. S. , Wu , C. Y. , Sheu , C. S. , Tsai , F. C. and Li , C. H. 2006 . The preparation of piezoelectric ZnO films by RF magnetron sputtering for layered surface acoustic wave device applications . Jpn. J. Appl. Phys. , 45 : 3531
   Web of Science ®Google Scholar
• Zhgoon , S. , Zhang , Q. , Yoon , S. F. , Revkov , A. , Gan , B. and Rusli , J. Ahn . 2000 . Surface acoustic waves in diamond-like carbon films on LiNbO3 . Diamond Relat. Mater. , 9 : 1430
   Google Scholar