115
Views
3
CrossRef citations to date
0
Altmetric
Section D: Characterization of Thin Films

Effect of Composition on the Physical Properties at Nanoscale of PZT Thin Films

, , &
Pages 106-114 | Received 02 Sep 2013, Accepted 21 Oct 2013, Published online: 01 May 2014

References

  • B. Jaffe, W.R. Cook, and H. Jaffe, Piezoelectric Ceramics. New York: Academic Press; 1971.
  • M. Miyake, J.F. Scott, X.J. Lou, F.D. Morrison, T. Nonaka, S. Motoyama, T. Tatsuta, and O. Tsuji, Submicron three-dimensional trenched electrodes and capacitors for DRAMs and FRAMs: Fabrication and electrical testing. J Appl Phys. 104, 064112-1-7 (2008).
  • J.F. Scott, and C.A. P. Araujo, Ferroelectric memories. Science. 246, 1400–1405 (1989).
  • J.F. M. Cillessen, M.W. J. Prins, and R.M. Wolf, Thickness dependence of the switching voltage in all-oxide ferroelectric thin-film capacitors prepared by pulsed laser deposition. J Appl Phys, 81, 2777–2783 (1997).
  • V. Nagarajan, I.G. Jenkins, S.P. Alpay, H. Li, S. Aggarwal, L. Salamanca-Riba, A.L. Roytburd, and R. Ramesh, Thickness dependence of structural and electrical properties in epitaxial lead zirconate titanate films. J Appl Phys, 86, 595–602 (1999).
  • T.M. Shaw, S. Trolier-McKinstry, and P.C. McIntyre, The properties of ferroelectric films at small dimensions. Annu Rev Mater Sci. 30, 263–298 (2000).
  • C.H. Ahn, K.M. Rabe, and J.M. Triscone, Ferroelectricity at the nanoscale: Local polarization in oxide thin films and heterostructures. Science. 303, 488–491 (2004).
  • E.C. Lima, E.B. Araújo, I.K. Bidkin, and A.L. Kholkin, The self-polarization effect in Pb(Zr0.50Ti0.50)O3 thin films with no preferential orientation. Mat Res Bull. 47, 3548–3551 (2012).
  • V.P. Afanasjev, I.P. Pronin, and A.L. Kholkin, Formation and relaxation mechanisms of the self-polarization in thin ferroelectric films. Phys Solid State. 48, 1214–1218 (2006).
  • A.L. Kholkin, K.G. Brooks, D.V. Taylor, S. Hiboux, and N. Setter, Self-polarization effect in Pb(Zr,Ti)O3 thin films. Integr Ferroelectr. 22, 525–533 (1998).
  • V.P. Afanasjev, A.A. Petrov, I.P. Pronin, E.A. Tarakanov, E.J. Kaptelov, and J. Graul, Polarization and self-polarization in thin PbZr1−xTixO3 (PZT) films. J Phys: Condens Matter. 13, 8755–8763 (2001).
  • A. Gruverman, B.J. Rodriguez, A.I. Kingon, R.J. Nemanich, A.K. Tagantsev, J.S. Cross, and M. Tsukada, Mechanical stress effect on imprint behavior of integrated ferroelectric capacitors. Appl Phys Lett. 83, 728–730 (2003).
  • D. Dawber, K.M. Rabe, and J.F. Scott, Physics of thin-film ferroelectric oxides. Rev Mod Phys. 77, 1083–1130 (2005).
  • A.K. Tagantsev, and G. Gerra, Interface-induced phenomena in polarization response of ferroelectric thin films. J Appl Phys. 100, 051607-1-28 (2006).
  • M. Kakihana, ‘‘Sol-Gel’’ preparation of high temperature superconducting oxides. J Sol-Gel Sci Tech. 6, 7–55 (1996).
  • J.P. de la Cruz, E. Joanni, P.M. Vilarinho, and A.L. Kholkin, Thickness effect on the dielectric, ferroelectric, and piezoelectric properties of ferroelectric lead zirconate titanate thin films. J Appl Phys. 108, 114106-1-8 (2010).
  • Y. Bastani, T. Schmitz-Kempen, A. Roelofs, and N. Bassiri-Gharb, Critical thickness for extrinsic contributions to the dielectric and piezoelectric response in lead zirconate titanate ultrathin films. J Appl Phys. 109, 014115-1-8 (2011).
  • F. Xu, S. Trolier-McKinstry, W. Ren, B. Xu, Z.L. Xie, and K.J. Hemker, Domain wall motion and its contribution to the dielectric and piezoelectric properties of lead zirconate titanate films. J Appl Phys. 89, 1336–1348 (2001).
  • N. Tohge, S. Takahashi, and T. Minami, Preparation of PbZrO3-PbTiO3 ferroelectric thin films by the sol-gel process. J Am Ceram Soc. 74, 67–71 (1991).
  • H.D. Chen, K.R. Udayakumar, C.J. Gaskey, and L.E. Cross, Electrical properties’ maxima in thin films of the lead zirconate-lead titanate solid solution system. Appl Phys Lett. 67, 3411–3413 (1995).
  • K. Kakegawa, J. Mohri, T. Takahashi, H. Yamamura, and S. Shirasaki, A compositional fluctuation and properties of Pb(Zr,Ti)O3. Sol Stat Commun. 24, 769–772 (1977).
  • B. Wang, K.W. Kwok, H.L. W. Chan, and C.L. Choy, Internal field and self-polarization in sol-gel-derived lead zirconate titanate films. Appl Phys A. 79, 643–646 (2004).
  • E.B. Araújo, E.C. Lima, I.K. Bidkin, and A.L. Kholkin, Thickness dependence of structure and piezoelectric properties at nanoscale of polycrystalline lead zirconate titanate thin films. J Appl Phys. 113, 187206-1-8 (2013).
  • A.L. Kholkin, E.K. Akdogan, A. Safari, P.F. Chauvy, and N. Setter, Characterization of the effective electrostriction coefficients in ferroelectric thin films. J Appl Phys. 89, 8066–8073 (2001).
  • R. Guo, L.E. Cross, S.E. Park, B. Noheda, D.E. Cox, and G. Shirane, Origin of the high piezoelectric response in PbZr1−xTixO3. Phys Rev Lett. 84, 5423–5426 (2000).

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.