Sputtered BaTiO₃ films for silicon on insulator structures

Takao Nagatomo Department of Electronics, Shibaura Institute of Technology, 3–9–14 Shibaura, Minato-ku, Tokyo, 108, Japan

Keiich Tanaka Department of Electronics, Shibaura Institute of Technology, 3–9–14 Shibaura, Minato-ku, Tokyo, 108, Japan

Akira Yamanashi Department of Electronics, Shibaura Institute of Technology, 3–9–14 Shibaura, Minato-ku, Tokyo, 108, Japan

Osamu Omoto Department of Electronics, Shibaura Institute of Technology, 3–9–14 Shibaura, Minato-ku, Tokyo, 108, Japan

References

Ishihara , H. and Furukawa , S. 1992 . a104 OYO BUTSURI(in Japanese)
Google Scholar
Furukawa , S. July 8–10 1992 . 11th Record of Alloy Semiconductor Physics and Electronics Symposium July 8–10 , 1 – 6 . Kyoto
Google Scholar
Nagatomo , T. , Kosaka , T. , Omori , S. and Omoto , O. 1981 . Femoelectrics , 37 : 681
Web of Science ®Google Scholar
Nagatomo , T. and Omoto , O. 1987 . Jpn. J. Appl. Phys. , 26 : 11 – 14 . Supp 1. 26–2
Google Scholar
Muller , E. K. , Nicholson , B. J. and L'E.Turner , G. 1963 . J. Electrochem. Soc. , 110 : 969
Web of Science ®Google Scholar
Matsunami , H. , Ishida , M. , Kimura , K. and Tanaka , T. Proceedings of the 2nd Meeting on Ferroelectric Materials and Their Applications . Kyoto. pp. 161 – 166 .
Google Scholar

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Sputtered BaTiO₃ films for silicon on insulator structures

References

Information for

Open access

Opportunities

Help and information

Your download is now in progress and you may close this window

Login or register to access this feature

Sputtered BaTiO3 films for silicon on insulator structures

References

Reprints and Corporate Permissions

Academic Permissions

Related research

To cite this article:

Download citation

Information for

Open access

Opportunities

Help and information

Keep up to date

Sputtered BaTiO₃ films for silicon on insulator structures