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Ferroelectrics Volume 170, 1995 - Issue 1
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Thin films

Phase and composition control of PZT thin films

Tadashi Shiosaki Department of Electronics, Faculty of Engineering, Kyoto University Yoshida Honmachi, Sakyo-ku, Kyoto, 606, Japan
&
Masaru Shimizu Department of Electronics, Faculty of Engineering, Kyoto University Yoshida Honmachi, Sakyo-ku, Kyoto, 606, Japan
Pages 47-55 | Received 22 Aug 1994, Published online: 26 Oct 2011

References

  • Shimizu , M. , Hayashi , K. , Katayama , T. and Shiosaki , T. Proc. 8th IEEE. Int. Symp. Application of Ferroelectrics . pp. 428 – 431 .
  • Shimizu , M. , Sugiyama , M. , Katayama , T. and Shiosaki , T. 1994 . Appl. Sur. Sci. , 79/80 : 293
  • Shimizu , M. , Fujimoto , M. , Katayama , T. , Shiosaki , T. , Nakaya , K. , Fukagawa , M. and Tanikawa , E. 1993 . Mat. Res. Soc. Symp. Proc. , 310 : 255
  • Shimizu , M. , Sugiyama , M. , Fujisawa , H. and Shiosaki , T. Proc. Int. Symp. Integrated Ferroelectrics . to be published in
  • Dormans , G. J. M. , de Keijser , P. M. , van Veldhoven , J. , Frigo , D. M. , Holewijn , G. J. E. , van Mier , P. M. and Smit , C. J. 1993 . Chem. Mater. , 5 : 448
  • Shimizu , M. , Katayama , T. , Sugiyama , M. and Shiosaki , T. 1993 . Jpn. J. Appl. Phys. , 32 : 4074
  • Shimizu , M. , Sugiyama , M. , Fujisawa , H. , Hamano , T. , Shiosaki , T. and Matsushige , K. 1994 . J. Cryst. Growth , to be published in
  • Shimizu , M. , Sugiyama , M. , Fujisawa , H. and Shiosaki , T. 1994 . Jpn. J. Appl. Phys. , to be published
  • Kanno , I. , Hayashi , S. , Kamada , T. , Kitagawa , M. and Hirao , T. 1993 . Jpn. J. Appl. Phys. , 32 : 4057
  • Kashihara , K. , Okudaira , T. , Itoh , H. , Higaki , T. and Abe , H. Symp. VLSI Technology Digest of Technical Papers 4B-4 . 1993 . pp. 49 – 50 .
  • Katayama , T. , Sugiyama , M. , Shimizu , M. and Shiosaki , T. Proc. 8th IEEE Int. Symp. Applications of Ferroelectrics . pp. 336 – 339 .
  • Hayashi , K. , Shimizu , M. and Shiosaki , T. 1993 . Jpn. J. Appl. Phys. , 32 : 4122
  • de Keijser , M. J. , van Veldhoven , P. and Dormans , D. J. M. 1993 . Mat. Res. Soc. Symp. Proc. , 310 : 223
  • Sakashita , Y. , Ono , T. , Segawa , H. , Tominaga , K. and Okada , M. 1991 . J. Appl. Phys. , 69 : 8352
  • Okada , M. and Tominaga , K. 1992 . Oyo Buturi , 61 : 1152 in Japanese
  • Sreenivas , K. , Sayer , M. and Garrett , P. 1989 . Thin Solid Films , 172 : 251
  • Iijima , K. , Nagao , N. , Takeuchi , T. , Ueda , I. , Tomita , Y. and Takayama , R. 1993 . Mat. Res. Soc. Symp. Proc. , 310 : 455

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