Piezoelectric properties of thin films of aliphatic polyurea 79 synthesized by vapor deposition polymerization

Takeshi Hattori Tsukuba Institute for Super Materials, ULVAC JAPAN, Ltd., Tokodai, Tsukuba, Ibaraki, 300–26, Japan

Masayuki Iijima Tsukuba Institute for Super Materials, ULVAC JAPAN, Ltd., Tokodai, Tsukuba, Ibaraki, 300–26, Japan

Yoshikazu Takahashi Tsukuba Institute for Super Materials, ULVAC JAPAN, Ltd., Tokodai, Tsukuba, Ibaraki, 300–26, Japan

Eiichi Fukada Tsukuba Institute for Super Materials, ULVAC JAPAN, Ltd., Tokodai, Tsukuba, Ibaraki, 300–26, Japan

Yoshiichi Suzuki Central Research & Development Laboratory, Showa Shell Sekiyu k.k., Shimokawaishi, Atsugi-shi, Kanagawa, 243–02, Japan

Masa Aki Kakimoto Dept. of Organic and Polymeric Materials, Tokyo Institute of Technology, Meguro-ku, Tokyo, 152, Japan

Yoshio Imai Dept. of Organic and Polymeric Materials, Tokyo Institute of Technology, Meguro-ku, Tokyo, 152, Japan

References