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Ferroelectrics Volume 166, 1995 - Issue 1
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Original Articles

Nanolayer BaTiO3 thin film capacitors using magnetron sputtering

Q. X. Jia Department of Electrical and Computer Engineering, State University of New York at Buffalo, Bonner Hall, Amherst, NY 14260, USA
,
L. H. Chang Department of Electrical and Computer Engineering, State University of New York at Buffalo, Bonner Hall, Amherst, NY 14260, USA
,
K. K. Ho Department of Electrical and Computer Engineering, State University of New York at Buffalo, Bonner Hall, Amherst, NY 14260, USA
&
W. A. Anderson Department of Electrical and Computer Engineering, State University of New York at Buffalo, Bonner Hall, Amherst, NY 14260, USA
Pages 111-117 | Received 15 Nov 1993, Accepted 29 Mar 1994, Published online: 25 Feb 2011

References

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  • Li , P. and Liu , T. M. 1990 . Reactive Partially Ionized Beam Deposition of BaTiO3 Thin Films . Appl. Phys. Lett. , 57 : 2336 – 2338 .
  • Kwak , B. S. , Zhang , K. , Boyd , E. P. , Erbil , A. and Wilkens , B. J. 1991 . Metalorganic Chemical Vapor Deposition of BaTiO3 Thin Films . J Appl. Phys. , 69 : 767 – 772 .
  • Kamalasanan , M. N. , Chandra , S. , Joshi , P. C. and Mansingh , A. 1991 . Structural and Optical Properties of Sol-Gel-Processed BaTiO3 Ferroelectric Thin Films . Appl. Phys. Lett. , 59 : 3547 – 3549 .
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  • Jia , Q. X. , Shi , Z. Q. and Anderson , W. A. 1992 . BaTiO3 Thin Film Capacitors Using Metallic Oxide as an Electrode . presented at the 34th Electronic Materials Conf. (EMC) . Jun. 24–26 1992 , Cambridge, MA.
  • Jia , Q. X. , Jiao , K. L. , Anderson , W. A. and Collins , F. M. 1993 . Development and Fabrication of Stable RuO2 Thin Film Resistors . Mater. Sci. Eng. B , 18 : 220 – 225 .
  • Li , P. and Lu , T. M. 1991 . Direct Observation of BaTiO3 Microcrystallites in Thin Amorphous BaTiO3 Films . Appl. Phys. Lett. , 59 : 1064 – 1605 .
  • Harrop , P. J. and Campbell , D. S. 1968 . Selection of Thin Film Capactior Dielectrics . Thin Solid Films , 2 : 273 – 292 .
  • Jia , Q. X. , Shi , Z. Q. and Anderson , W. A. 1992 . BaTiO3 Thin Films Capacitors Deposited by RF Magnetron Sputtering . Thin Solid Films , 209 : 230 – 239 .

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