The microstrucure dependence on processing temperature in sol-gel derived thin ferroelectric films of LiNbo₃ on SiO₂/Si substrate

S. D. Cheng Microelectronics Division, School of Electrical and Electronic Engineering, Nanyang Technological University, Nanyang Ave., S639798, Singapore

C. H. Kam Microelectronics Division, School of Electrical and Electronic Engineering, Nanyang Technological University, Nanyang Ave., S639798, Singapore

Y. Zhou Microelectronics Division, School of Electrical and Electronic Engineering, Nanyang Technological University, Nanyang Ave., S639798, Singapore

Y. L. Lam Microelectronics Division, School of Electrical and Electronic Engineering, Nanyang Technological University, Nanyang Ave., S639798, Singapore

Y. C. Chan Microelectronics Division, School of Electrical and Electronic Engineering, Nanyang Technological University, Nanyang Ave., S639798, Singapore

Z. Sun Microelectronics Division, School of Electrical and Electronic Engineering, Nanyang Technological University, Nanyang Ave., S639798, Singapore

W. S. Gan Acoustical Services Singapore Pte. Ltd., Innovation Center, 209–212, Nanyang Avenue, S639798, Singapore

K. Pita Material Technology and Application Center, Technology Development Division, Singapore Productivity and Standards Board, 1 Science Park Drive, S118221, Singapore

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The microstrucure dependence on processing temperature in sol-gel derived thin ferroelectric films of LiNbo₃ on SiO₂/Si substrate

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The microstrucure dependence on processing temperature in sol-gel derived thin ferroelectric films of LiNbo3 on SiO2/Si substrate

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The microstrucure dependence on processing temperature in sol-gel derived thin ferroelectric films of LiNbo₃ on SiO₂/Si substrate