802
Views
16
CrossRef citations to date
0
Altmetric
Original Articles

Estimation and monitoring of key performance indicators of manufacturing systems using the multi-output Gaussian process

, &
Pages 2304-2319 | Received 28 Feb 2016, Accepted 06 Sep 2016, Published online: 11 Oct 2016

References

  • Backus, P., M. Janakiram, S. Mowzoon, C. Runger, and A. Bhargava. 2006. “Factory Cycle-time Prediction with a Data-mining Approach.” IEEE Transactions on Semiconductor Manufacturing 19 (2): 252–258.10.1109/TSM.2006.873400
  • Balsamo, S., V. de Nitto Personé, and R. Onvural. 2013. Analysis of Queueing Networks with Blocking. New York: Springer Science and Business Media.
  • Boyle, P., and M. Frean. 2004. “Dependent Gaussian Processes.” Advances in Neural Information Processing Systems 17: 217–224.
  • Chen, N., and S. Zhou. 2010. “Simulation-based Estimation of Cycle Time Using Quantile Regression.” IIE Transactions 43 (3): 176–191.10.1080/0740817X.2010.521806
  • Chen, H., X. Shen, and D. D. Yao. 2002. “Brownian Approximations of Multiclass Open-queueing Networks.” Operations Research 50 (6): 1032–1049.10.1287/opre.50.6.1032.349
  • Chien, C. F., C. W. Hsiao, C. Meng, K. T. Hong, and S. T. Wang. 2005. “Cycle Time Prediction and Control Based on Production Line Status and Manufacturing Data Mining.” ISSM 2005 IEEE International Symposium on Semiconductor Manufacturing, San Jose, CA, September.
  • Cicorella, P., B. M. Colosimo, and M. Pacella. 2013. “Statistical Process Monitoring of Complex Shapes via Gaussian Process Modeling, S.Co. 2013.” Complex data Modelling and Computationally Intensive Statistical Methods for Estimation and Predictions, Milano, September 9–13.
  • Colosimo, B. M., P. Cicorella, M. Pacella, and M. Blaco. 2014. “From Profile to Surface Monitoring: SPC for Cylindrical Surfaces via Gaussian Processes.” Journal of Quality Technology 46 (2): 95.
  • Gaudard, M., M. Karson, E. Linder, and D. Sinha. 1999. “Bayesian Spatial Prediction.” Environmental and Ecological Statistics 6 (2): 147–171.10.1023/A:1009614003692
  • Glassey, C. R., and M. G. Resende. 1988. “Closed-loop Job Release Control for VLSI Circuit Manufacturing.” IEEE Transactions on Semiconductor Manufacturing 1 (1): 36–46.10.1109/66.4371
  • Higdon, D. 2002. “Space and Space-time Modeling Using Process Convolutions.” Quantitative Methods for Current Environmental Issues 37–56.10.1007/978-1-4471-0657-9
  • Huang, M. G., P. L. Chang, and Y. C. Chou. 2001. “Analytic Approximations for Multiserver Batch-service Workstations with Multiple Process Recipes in Semiconductor Wafer Fabrication.” IEEE Transactions on Semiconductor Manufacturing 14 (4): 395–405.10.1109/66.964327
  • Hung, Y. F., and C. B. Chang. 1999. “Using an Empirical Queueing Approach to Predict Future Flow times.” Computers & Industrial Engineering 37 (4): 809–821.10.1016/S0360-8352(00)00013-9
  • Johnson, R. A., and D. W. Wichern. 2002. Applied Multivariate Statistical Analysis. Upper Saddle River, NJ: Prentice hall.
  • Kingman, J. F. C. 1961. “The Single Server Queue in Heavy Traffic.” Mathematical Proceedings of the Cambridge Philosophical Society 57 (4): 902–904.10.1017/S0305004100036094
  • Kuehn, P. 1979. “Approximate Analysis of General Queuing Networks by Decomposition.” IEEE Transactions on Communications 27 (1): 113–126.10.1109/TCOM.1979.1094270
  • Livny, M., B. Melamed, and A. K. Tsiolis. 1993. “The Impact of Autocorrelation on Queuing Systems.” Management Science 39 (3): 322–339.10.1287/mnsc.39.3.322
  • Majumdar, A., and A. E. Gelfand. 2007. “Multivariate Spatial Modeling for Geostatistical Data Using Convolved Covariance Functions.” Mathematical Geology 39: 225–245.10.1007/s11004-006-9072-6
  • Matern, B. 1986. Spatial Variation. 2nd ed. New York: Springer-Verlag.10.1007/978-1-4615-7892-5
  • Matta, A., M. Pezzoni, and Q. Semeraro. 2012. “A Kriging-based Algorithm to Optimize Production Systems Approximated by Analytical Models.” Journal of Intelligent Manufacturing 23 (3): 587–597.10.1007/s10845-010-0397-0
  • Miltenburg, J., C. H. Cheng, and H. Yan. 2002. “Analysis of Wafer Fabrication Facilities Using Four Variations of the Open Queueing Network Decomposition Model.” IIE Transactions 34 (3): 263–272.
  • Raddon, A., and B. Grigsby. 1997. “Throughput Time Forecasting Model.” Proceedings of the 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference, September 430–433.
  • Rasmussen, C. E. 2006. Gaussian Processes for Machine Learning. Cambridge, MA: MIT Press.
  • Schulz, T., and A. Chelaru. 2013. “Model Driven Key Performance Indicators Concepts for Manufacturing Execution Systems.” Applied Mechanics and Materials 245: 173–178.
  • Shanthikumar, J. G., and J. A. Buzacott. 1981. “Open Queueing Network Models of Dynamic Job Shops.” International Journal of Production Research 19 (3): 255–266.10.1080/00207548108956652
  • Shanthikumar, J. G., S. Ding, and M. T. Zhang. 2007. “Queueing Theory for Semiconductor Manufacturing Systems: A Survey and Open Problems.” IEEE Transactions on Automation Science and Engineering 4 (4): 513–522.10.1109/TASE.2007.906348
  • Thiébaux, H. J., and M. A. Pedder. 1987. Spatial Objective Analysis: With Applications in Atmospheric Science. London: Academic Press.
  • Ver Hoef, J. M., and R. P. Barry. 1998. “Constructing and Fitting Models for Cokriging and Multivariable Spatial Prediction.” Journal of Statistical Planning and Inference 69: 275–294.10.1016/S0378-3758(97)00162-6
  • Ver Hoef, J. M., N. Cressie, and R. P. Barry. 2004. “Flexible Spatial Models for Kriging and Cokriging Using Moving Averages and the Fast Fourier Transform (FFT).” Journal of Computational and Graphical Statistics 13 (2): 265–282.10.1198/1061860043498
  • Wein, L. M. 1988. “Scheduling Semiconductor Wafer Fabrication.” IEEE Transactions on Semiconductor Manufacturing 1 (3): 115–130.10.1109/66.4384
  • Whitt, W. 1989. “Planning Queueing Simulations.” Management Science 35 (11): 1341–1366.10.1287/mnsc.35.11.1341
  • Xia, H., Y. Ding, and J. Wang. 2008. “Gaussian Process Method for Form Error Assessment Using Coordinate Measurements.” IIE Transactions 40 (10): 931–946.
  • Xu, X. L. 2011. “Hull Subsection Production Crisis Early Warning System Design Based on the KPI.” In: Information Systems for Crisis Response and Management (ISCRAM), Harbin, Heilongjiang, November, 118–122.
  • Youngblood, A. D., and T. R. Collins. 2003. “Addressing Balanced Scorecard Trade-off Issues between Performance Metrics Using Multi-attribute Utility Theory.” Engineering Management Journal 15 (1): 11–17.10.1080/10429247.2003.11415191
  • Yuan, J., K. Wang, T. Yu, and M. Fang. 2008. “Reliable Multi-objective Optimization of High-speed WEDM Process Based on Gaussian Process Regression.” International Journal of Machine Tools and Manufacture 48 (1): 47–60.10.1016/j.ijmachtools.2007.07.011
  • Zhang, Y., Z. He, C. Zhang, and W. H. Woodall. 2014. “Control Charts for Monitoring Linear Profiles with within-profile Correlation Using Gaussian Process Models.” Quality and Reliability Engineering International 30 (4): 487–501.10.1002/qre.v30.4
  • Zhang, L., K. Wang, and N. Chen. 2016. “Monitoring Wafers Geometric Quality Using an Additive Gaussian Process Model.” IIE Transactions 48 (1): 1–15.
  • Zimmerman, D. L., and D. A. Harville. 1991. “A Random Field Approach to the Analysis of Field-plot Experiments and Other Spatial Experiments.” Biometrics 223–239.10.2307/2532508

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.