Wafer delay analysis and control of dual-armed cluster tools with chamber cleaning operations

References

• Baccelli, François, Guy Cohen, Geert Jan Olsder, and Jean-Pierre Quadrat. 1992. Synchronization and Linearity: An Algebra for Discrete Event Systems. Chichester: John Wiley & Sons Ltd.
   Google Scholar
• Drobouchevitch, Inna G., Suresh P. Sethi, and Chelliah Sriskandarajah. 2006. “Scheduling Dual Gripper Robotic Cell: One-unit Cycles.” European Journal of Operational Research 171 (2): 598–631. doi: 10.1016/j.ejor.2004.09.019
   Web of Science ®Google Scholar
• Franssila, Sami. 2010. Introduction to Microfabrication. Chichester: John Wiley & Sons.
   Google Scholar
• Geismar, H. Neil, U. V. Manoj, Avanthi Sethi, and Chelliah Sriskandarajah. 2012. “Scheduling Robotic Cells Served by a Dual-Arm Robot.” IIE Transactions 44 (3): 230–248. doi: 10.1080/0740817X.2011.618174
   Web of Science ®Google Scholar
• Jiang, Ai-Guo, Eng-Hwa Wong, Koh-Ping Chai, Fang-Hong Gn, Terry T. Lee, and Gary Loh. 2007. “Reducing Cost and PFC Effluent with Optimized C2F6 Chamber Cleaning.” Solid State Technology50 (3): 54–55+63.
   Web of Science ®Google Scholar
• Jung, Chihyun, and Tae-Eog Lee. 2012. “An Efficient Mixed Integer Programming Model Based on Timed Petri Nets for Diverse Complex Cluster Tool Scheduling Problems.” IEEE Transactions on Semiconductor Manufacturing 25 (2): 186–199. doi: 10.1109/TSM.2011.2180547
   Web of Science ®Google Scholar
• Kim, Tae-Kyu, Chihyun Jung, and Tae-Eog Lee. 2012. “Scheduling Start-up and Close-down Periods of Dual-armed Cluster Tools with Wafer Delay Regulation.” International Journal of Production Research50 (10): 2785–2795. doi: 10.1080/00207543.2011.590949
   Web of Science ®Google Scholar
• Kim, Heejung, Hyun-Jung Kim, Jun-Ho Lee, and Tae-Eog Lee. 2013. “Scheduling Dual-armed Cluster Tools with Cleaning Processes.” International Journal of Production Research 51 (12): 3671–3687. doi: 10.1080/00207543.2012.758392
   Web of Science ®Google Scholar
• Kim, Ja-Hee, and Tae-Eog Lee. 2008. “Schedulability Analysis of Time-Constrained Cluster Tools with Bounded Time Variation by An Extended Petri Net.” IEEE Transactions on Automation Science and Engineering 5 (3): 490–503. doi: 10.1109/TASE.2007.912716
   Web of Science ®Google Scholar
• Kim, Chulhan, and Tae-Eog Lee. 2015. “Feedback Control of Cluster Tools for Regulating Wafer Delays.” IEEE Transactions on Automation Science and Engineering PP: 1–11.
   Google Scholar
• Kim, Hyun-Jung, Jun-Ho Lee, and Tae-Eog Lee. 2016. “Schedulability Analysis for Noncyclic Operation of Time-constrained Cluster Tools with Time Variation.” IEEE Transactions on Automation Science and Engineering 13 (3): 1409–1414. doi: 10.1109/TASE.2016.2531105
   Web of Science ®Google Scholar
• Kim, Ja-Hee, Tae-Eog Lee, Hwan-Yong Lee, and Doo-Byeong Park. 2003. “Scheduling Analysis of Time-constrained Dual-armed Cluster Tools.” IEEE Transactions on Semiconductor Manufacturing 16 (3): 521–534. doi: 10.1109/TSM.2003.815203
   Web of Science ®Google Scholar
• Lee, Tae-Eog. 2000. “Stable Earliest Starting Schedules for Cyclic Job Shops: A Linear System Approach.” International Journal of Flexible Manufacturing Systems 12 (1): 59–80. doi: 10.1023/A:1008123115577
   Google Scholar
• Lee, Tae-Eog. 2008. “A Review of Scheduling Theory and Methods for Semiconductor Manufacturing Cluster Tools.” In Proceedings of the Winter Simulation Conference, 2127–2135.
   Google Scholar
• Lee, Tae-Eog, Hyun-Jung Kim, Dong-Hyun Roh, and Ramavarapu S. Sreenivas. 2017. “Characterizing Token Delays of Timed Event Graphs for K-Cyclic Schedules.” IEEE Transactions on Automatic Control 62 (2): 961–966. doi: 10.1109/TAC.2016.2570122
   Web of Science ®Google Scholar
• Lee, Tae-Eog, Hwan-Yong Lee, and Ramavarapu S. Sreenivas. 2006. “Token Delays and Generalized Workload Balancing for Timed Event Graphs with Application to Cluster Tool.” In Proceedings of the IEEE Conference on Automation Science and Engineering. IEEE.
   Google Scholar
• Lee, Tae-Eog, and Seong-Ho Park. 2005. “An Extended Event Graph with Negative Places and Tokens for Time Window Constraints.” IEEE Transactions on Automation Science and Engineering 2 (4): 319–332. doi: 10.1109/TASE.2005.851236
   Web of Science ®Google Scholar
• Lee, Tae-Eog, Seong-Ho Park, and Chihyun Jung. 2014. “Steady State Analysis of Timed Event Graphs with Time Window Constraints.” Discrete Applied Mathematics 167: 202–216. doi: 10.1016/j.dam.2013.12.006
   Web of Science ®Google Scholar
• Lee, Tae-Eog, and Marc E. Posner. 1997. “Performance Measures and Schedules in Periodic Job Shops.” Operations Research 45 (1): 72–91. doi: 10.1287/opre.45.1.72
   Web of Science ®Google Scholar
• Lee, Jun-Ho, Cong Zhao, Jingshan Li, and Chrissoleon T. Papadopoulos. 2018. “Analysis, Design, and Control of Bernoulli Production Lines with Waiting Time Constraints.” Journal of Manufacturing Systems 46: 208–220. doi: 10.1016/j.jmsy.2018.01.001
   Web of Science ®Google Scholar
• López, Marcel J., and Samuel C. Wood. 2003. “Systems of Multiple Cluster Tools: Configuration, Reliability, and Performance.” IEEE Transactions on Semiconductor Manufacturing 16 (2): 170–178. doi: 10.1109/TSM.2003.810936
   Web of Science ®Google Scholar
• Murata, Tadao. 1989. “Petri Nets: Properties, Analysis and Applications.” Proceedings of the IEEE 77 (4): 541–580. doi: 10.1109/5.24143
   Web of Science ®Google Scholar
• Noh, Seung-Min, Ja-hee Kim, and Seong-Yong Jang. 2015. “Scheduling of Single-armed Cluster Tool Considering Cleaning Processes.” In Proceedings of the Asia Simulation Conference, 475–484.
   Google Scholar
• Qiao, Yan, Nai Qi Wu, and Meng Chu Zhou. 2013. “A Petri Net-based Novel Scheduling Approach and Its Cycle Time Analysis for Dual-arm Cluster Tools with Wafer Revisiting.” IEEE Transactions on Semiconductor Manufacturing 26 (1): 100–110. doi: 10.1109/TSM.2012.2222945
   Web of Science ®Google Scholar
• Rostami, Shadi, and Babak Hamidzadeh. 2002. “Optimal Scheduling Techniques for Cluster Tools with Process-module and Transport-module Residency Constraints.” IEEE Transactions on Semiconductor Manufacturing 15 (3): 341–349. doi: 10.1109/TSM.2002.801379
   Web of Science ®Google Scholar
• Rostami, Shadi, Babak Hamidzadeh, and Dan Camporese. 2001. “An Optimal Periodic Scheduler for Dual-arm Robots in Cluster Tools with Residency Constraints.” IEEE Transactions on Robotics and Automation 17 (5): 609–618. doi: 10.1109/70.964662
   Google Scholar
• Sethi, Suresh P., Jeffrey B. Sidney, and Chelliah Sriskandarajah. 2001. “Scheduling in Dual Gripper Robotic Cells for Productivity Gains.” IEEE Transactions on Robotics and Automation 17 (3): 324–341. doi: 10.1109/70.938389
   Google Scholar
• Venkatesh, Srilakshmi, Rob Davenport, Pattie Foxhoven, and Jaim Nulman. 1997. “A Steady-state Throughput Analysis of Cluster Tools: Dual-blade Versus Single-blade Robots.” IEEE Transactions on Semiconductor Manufacturing 10 (4): 418–424. doi: 10.1109/66.641483
   Web of Science ®Google Scholar
• Wu, Nai Qi, Feng Chu, Chengbin Chu, and Meng Chu Zhou. 2013. “Petri Net Modeling and Cycle-time Analysis of Dual-arm Cluster Tools with Wafer Revisiting.” IEEE Transactions on Systems, Man, and Cybernetics: Systems 43 (1): 196–207. doi: 10.1109/TSMCA.2012.2187890
   Web of Science ®Google Scholar
• Wu, Nai Qi, and Meng Chu Zhou. 2010a. “Analysis of Wafer Sojourn Time in Dual-arm Cluster Tools with Residency Time Constraint and Activity Time Variation.” IEEE Transactions on Semiconductor Manufacturing 23 (1): 53–64. doi: 10.1109/TSM.2009.2039243
   Web of Science ®Google Scholar
• Wu, Nai Qi, and Meng Chu Zhou. 2010b. “A Closed-form Solution for Schedulability and Optimal Scheduling of Dual-arm Cluster Tools with Wafer Residency Time Constraint Based on Steady Schedule Analysis.” IEEE Transactions on Automation Science and Engineering 7 (2): 303–315. doi: 10.1109/TASE.2008.2008633
   Web of Science ®Google Scholar
• Wu, Nai Qi, and Meng Chu Zhou. 2012. “Schedulability Analysis and Optimal Scheduling of Dual-arm Cluster Tools with Residency Time Constraint and Activity Time Variation.” IEEE Transactions on Automation Science and Engineering 9 (1): 203–209. doi: 10.1109/TASE.2011.2160452
   Web of Science ®Google Scholar
• Yang, Fa Jun, Yan Qiao, Kai Zhou Gao, Nai Qi Wu, Yu Ting Zhu, Ian Ware Simon, and Rong Su. 2018. “Efficient Approach to Scheduling of Transient Processes for Time-Constrained Single-Arm Cluster Tools With Parallel Chambers.” IEEE Transactions on Systems, Man, and Cybernetics: Systems 99: 1–12.
   Google Scholar
• Yang, Fa Jun, Nai Qi Wu, Yan Qiao, and Meng Chu Zhou. 2014. “Petri Net-based Optimal One-wafer Cyclic Scheduling of Hybrid Multi-cluster Tools in Wafer Fabrication.” IEEE Transactions on Semiconductor Manufacturing 27 (2): 192–203. doi: 10.1109/TSM.2014.2312192
   Web of Science ®Google Scholar
• Yu, Tae-Sun, Hyun-Jung Kim, and Tae-Eog Lee. 2017. “Minimization of Waiting Time Variation in a Generalized Two-machine Flowshop with Waiting Time Constraints and Skipping Jobs.” IEEE Transactions on Semiconductor Manufacturing 30 (2): 155–165. doi:10.1109/TSM.2017.2662231.
   Web of Science ®Google Scholar
• Yu, Tae-Sun, Hyun-Jung Kim, and Tae-Eog Lee. 2018. “Scheduling Single-armed Cluster Tools with Chamber Cleaning Operations.” IEEE Transactions on Automation Science and Engineering 15 (2): 705–716. doi: 10.1109/TASE.2017.2682271
   Web of Science ®Google Scholar
• Yu, Tae-Sun, and Tae-Eog Lee. 2017. “Scheduling Dual-Armed Cluster Tools with Chamber Cleaning Operations.” IEEE Transactions on Automation Science and Engineering. doi:10.1109/TASE.2017.2764105.
   Google Scholar
• Zhu, Qing Hua, Nai Qi Wu, Yan Qiao, and Meng Chu Zhou. 2013. “Petri Net-based Optimal One-wafer Scheduling of Single-arm Multi-cluster Tools in Semiconductor Manufacturing.” IEEE Transactions on Semiconductor Manufacturing 26 (4): 578–591. doi: 10.1109/TSM.2013.2278378
   Web of Science ®Google Scholar
• Zhu, Qing Hua, Meng Chu Zhou, Yan Qiao, and Nai Qi Wu. 2017. “Scheduling Transient Processes for Time-Constrained Single-Arm Robotic Multi-Cluster Tools.” IEEE Transactions on Semiconductor Manufacturing 30 (3): 261–269. doi: 10.1109/TSM.2017.2721970
   Web of Science ®Google Scholar
• Zuberek, Wlodzimierz M. 2001. “Timed Petri Nets in Modeling and Analysis of Cluster Tools.” IEEE Transactions on Robotics and Automation 17 (5): 562–575. doi: 10.1109/70.964658
   Google Scholar