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Radiation Effects Volume 48, 1980 - Issue 1-4
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Original Articles

Dual species ion implantation in GaAs

Taroh Inada Collqqe of Engineering, Hosei University, Kajino-cho, Koganei, Tokyo, 184, Japan
,
Shigeki Kato Collqqe of Engineering, Hosei University, Kajino-cho, Koganei, Tokyo, 184, Japan
,
Tatsuya Ohkubo Collqqe of Engineering, Hosei University, Kajino-cho, Koganei, Tokyo, 184, Japan
&
Tohru Hara Matsushita Research Institute Tokyo, Inc. Ikuta, Tama-ku, Kawasaki, 214, Japan
Pages 91-95 | Published online: 20 Nov 2006

References

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