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Radiation Effects Volume 48, 1980 - Issue 1-4
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Original Articles

Crystallization of ion implanted silicon layers by the nanosecond laser pulses

S. I. Romanov Institute of Semiconductor Physics, Academy of Science of USSR, Siberian Branch, Novosibirsk, USSR
,
G. A. Kachurin Institute of Semiconductor Physics, Academy of Science of USSR, Siberian Branch, Novosibirsk, USSR
,
L. S. Smirnov Institute of Semiconductor Physics, Academy of Science of USSR, Siberian Branch, Novosibirsk, USSR
,
I. B. Khaibullin Kazan Physico-Technical Institute, Academy of Science of USSR, Kazan Branch, Kazan, USSR
,
E. I. Shtyrkov Kazan Physico-Technical Institute, Academy of Science of USSR, Kazan Branch, Kazan, USSR
&
R. M. Bajazitov Kazan Physico-Technical Institute, Academy of Science of USSR, Kazan Branch, Kazan, USSR
Pages 191-194 | Published online: 20 Nov 2006

References

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  • Kachurin , G. A. , Pridachin , N. B. and Smirnov , L. S. 1975 . Fiz. Tekh. Poluprov. , 9 : 1428
  • Shtyrkov , E. I. , Khaibullin , I. B. , Zaripov , M. M. , Galjautdinov , M. F. and Bajazitov , R. M. 1975 . Fiz. Tekh. Poluprov. , 9 : 2000
  • Kutukova , O. G. and Streľtsov , L. N. 1976 . Fiz. Tekh. Poluprov. , 10 : 443
  • Kachurin , G. A. , Bogatyriov , V. A. , Romanov , S. I. and Smirnov , L. S. 1977 . Ion Implantation in Semiconductors , Edited by: Chernov , F. , Borders , J. A. and Brice , D. K. p. 445 Boulder : Plenum Press .
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  • Khaibullin , I. B. , Shtyrkov , E. I. , Zaripov , M. M. , Galjautdinov , M. F. and Zakirov , G. G. 1977 . Fiz. Tekh. Poluprov. , 11 : 330
  • Antonenko , A. Kh. , Gerasimenko , N. N. , Dvurechensky , A. V. , Smirnov , L. S. and Tseitlin , G. M. 1976 . Fiz. Tekh. Poluprov. , 10 : 139
  • Kachurin , G. A. and Nidaev , E. V. 1976 . Fiz. Tekh. Poluprov. , 10 : 2012
  • Young , R. T. 1978 . Appl. Phycs. Lett. , 32 : 139
  • Abru , U. R. 1977 . Elekt. tekh., ser. 3, mikroelektr , 3 : 75
  • Seto John , J. W. 1976 . J. Appl. Phys. , 47 : 5167
  • Celler , G. K. 1978 . Appl. Phys. Lett. , 32 : 464
  • Kalinin , V. V. 1978 . Phys. St. Sol. , A45 : 377

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