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Spectroscopy Letters
An International Journal for Rapid Communication
Volume 44, 2011 - Issue 1
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Original Articles

Hydrogen Degree of Dissociation in a Low Pressure Tandem Plasma Source

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Pages 8-16 | Received 07 Sep 2009, Accepted 05 Oct 2009, Published online: 11 Jan 2011

REFERENCES

  • Lieberman , M. A. ; Lichtenberg , A. J. Principles of Plasma Discharges and Materials Processing; , 2nd ed. ; Wiley-Interscience : New Jersey , 2005 .
  • Brown , I. G. The Physics and Technology of Ion Sources ; Wiley-VCH : Weinheim , 2004 .
  • Bacal , M. ; Hatayama , A. ; Peters , J. Volume production negative hydrogen ion sources . IEEE Trans. Plasma Sci. 2005 , 33 , 1845 – 1871 .
  • Fantz , U. Emission spectroscopy of molecular low pressure plasmas . Contrib. Plasma Phys. 2004 , 44 , 508 – 515 .
  • Hippler , R. ; Pfau , S. ; Schmidt , M. ; Schoenbach , K. H. Low Temperature Plasma Physics: Fundamental Aspects and Applications ; Wiley-VCH : Berlin , 2001 .
  • Coburn , J. W. ; Chen , M. Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle density . J. Appl. Phys. 1980 , 51 , 3134 – 3136 .
  • St-Onge , L. ; Moisan , M. Hydrogen atom yield in RF and microwave hydrogen discharges . Plasma Chem. Plasma Process. 1994 , 14 , 87 – 116 .
  • Rousseau , A. ; Granier , A. ; Gousset , G. ; Leprince , P. Microwave discharge in H2: Influence of H-atom density on the power balance . J. Phys. D: Appl. Phys. 1994 , 27 , 1412 – 1422 .
  • Otorbaev , D. K. “Simple” diagnostics for characterization of low-pressure chemically active plasmas . Pure Appl. Chem. 2002 , 74 , 453 – 457 .
  • Abdel-Rahman , M. ; Schulz-von der Gathen , V. ; Gans , T. ; Niemi , K. ; Döbele , H. F. Determination of the degree of dissociation in an inductively coupled hydrogen plasma using optical emission spectroscopy and laser diagnostics . Plasma Sources Sci. Technol. 2006 , 15 , 620 – 626 .
  • Schulz-von der Gathen , V. ; Döbele , H. F. Critical comparison of emission spectroscopic determination of dissociation in hydrogen RF discharges . Plasma Chem. Plasma Process. 1996 , 16 , 461 – 486 .
  • Gicquel , A. ; Chenevier , M. ; Hassouni , Kh. ; Tserepi , A. ; Dubus , M. Validation of actinometry for estimating relative hydrogen atom densities and electron energy evolution in plasma assisted diamond deposition reactors . J. Appl. Phys. 1998 , 83 , 7504 – 7521 .
  • Malyshev , M. V. ; Donnelly , V. M. Trace rare gases optical emission spectroscopy: Nonintrusive method for measuring electron temperatures in low-pressure, low-temperautre plasmas . Phys. Rev. E 1999 , 60 , 6016 – 6029 .
  • Donnelly , V. M. Plasma electron temperatures and electron energy distributions measured by trace rare gases optical emission spectroscopy . J. Phys. D: Appl. Phys. 2004 , 37 , R217 – R236 .
  • Fantz , U. ; Wünderlich , D. A novel diagnostic technique for H−(D−) densities in negative hydrogen ion sources . New J. Phys. 2006 , 8 , 301 (23 pp) .
  • Fantz , U. ; Falter , H. ; Franzen , P. ; Wünderlich , D. ; Berger , M. ; Lorenz , A. ; Kraus , W. ; McNeely , P. ; Riedl , R. ; Speth , E. Spectroscopy-a powerful diagnostic tool in source development . Nucl. Fusion 2006 , 46 , S297 – S306 .
  • Kiss'ovski , Z. ; Kolev , St. ; Shivarova , A. ; Tsankov , T. Expanding plasma region of an inductively driven hydrogen discharge. IEEE Trans. Plasma Sci. 2007, 35, 1149–1155.
  • Kiss'ovski , Z. ; Kolev , St. ; Müller , S. ; Paunska , T. ; Shivarova , A. ; Tsankov , Ts. Expanding hydrogen plasmas: photodetachment technique diagnostics . Plasma Phys. Control. Fusion 2009 , 51 , 015007 (12 pp) .
  • Lavrov , B. P. ; Pipa , A. V. Account of the fine structure of hydrogen atom levels in the effective emission cross sections of Balmer lines excited by electron Impact in gases and plasma . Opt. Spectrosc. 2002 , 92 , 709 – 719 .
  • Walker , Jr. J. D. ; John , R. M. St. Design of a high density atomic hydrogen source and determination of Balmer cross sections . J. Chem. Phys. 1974 , 61 , 2394 – 2407 .
  • Hayashi , M. Bibliography of Electron and Photon Cross Sections with Atoms and Molecules – Argon; NIFS-DATA-72, TOKI, Japan , 2003 .
  • Chilton , J. E. ; Boffard , J. B. ; Schappe , R. S. ; Lin , C. C. Measurement of electron-impact excitation into the 3p54p levels of argon using Fourier-transform spectroscopy . Phys. Rev. A 1998 , 57 , 267 – 277 .
  • Bartschat , K. ; Zeman , V. Electron-impact excitation from the (3p54 s) metastable states of argon . Phys. Rev. A 1999 , 59 , R2552 – R2554 .
  • http://nist.gov/
  • Wiese , W. L. ; Brault , J. W. ; Danzmann , K. ; Helbig , V. ; Kock , M. Unified set of atomic transition probabilities for neutral argon . Phys. Rev. A 1989 , 39 , 2461 – 2471 .
  • Möhlmann , G. R. ; De Heer , F. J. ; Los , J. Emission cross sections of Balmer – α,β,γ radiation for electrons (0–2000 eV) on H2 and D2 . Chem. Phys. 1977 , 25 , 103 – 116 .
  • Wouters , M. J. ; Khachan , J. ; Falconer , I. S. ; James , B. W. Quenching of excited Ar I and H by H2 in a gas discharge . J. Phys. B: At. Mol. Opt. Phys. 1999 , 32 , 2869 – 2880 .
  • Biberman , L. M. ; Vorobev , V. S. ; Yakubov , I. T. Kinetics of Nonequilibrium Low-Temperature Plasma ; Nauka : Moscow , 1982 .
  • Iordanova , S. Spectroscopic temperature measurements in hydrogen inductively-driven plasmas at low pressures . J. Phys.: Conf. Series 2008 , 113 , 012005 (5 pp) .
  • Marechal , M. A. ; Jost , R. ; Lombardi , M. Lifetimes, g factors, and collision cross sections of hydrogen molecules in the (1s3p) 3Πu . Level. Phys. Rev. A 1972 , 5 , 732 – 740 .
  • Lavrov , B. P. Determination of the gas temperature of a low-pressure plasma from the intensities of the H2 and D2 molecular bands. Relationship between the intensity distribution in a band and the gas temperature . Opt. Spectrosc. 1980 , 48 , 375 – 380 .
  • Qing , Z. ; Otorbaev , D. K. ; Brussaard , G. J. H. ; van de Sanden , M. C. M. ; Schram , D. C. Diagnostics of the magnetized low-pressure hydrogen plasma jet: Molecular regime . J. Appl. Phys. 1996 , 80 , 1312 – 1324 .
  • McNeely , P. ; Dudin , S. V. ; Christ-Koch , S. ; Fantz , U. NNBI Team A Langmuir probe system for high power RF-driven negative ion sources on high potential . Plasma Sources Sci. Technol. 2009 , 18 , 014011 (17 pp) .
  • Volynets , V. N. ; Park , W. ; Tolmachev , Yu. N. ; Pashkovsky , V. G. Spatial variation of plasma parameters and ion acceleration in an inductive plasma system . J. Appl. Phys. 2006 , 99 , 043302 (5 pp) .
  • Lishev , St. ; Shivarova , A. ; Tsankov , T. Experiments on the detection of negative hydrogen Ions in a small-size tandem plasma source . AIP Conf. Proc. 2009 , 1097 , 127 – 136 .
  • Djermanov , I. ; Kolev , St. ; Lishev , St. ; Shivarova , A. ; Tsankov , Ts. Plasma behaviour affected by a magnetic filter . J. Phys.: Conf. Series 2007 , 63 , 012021 (6 pp) .
  • Iordanova , S. ; Koleva , I. Optical emission spectroscopy diagnostics of inductively-driven plasmas in argon gas at low pressures . Spectrochim. Acta Part B 2007 , 62 , 344 – 356 .
  • Crintea , D. L. ; Czarnetzki , U. ; Iordanova , S. ; Koleva , I. ; Luggenhölscher , D. Plasma diagnostics by optical emission spectroscopy in argon and comparison with Thomson scattering . J. Phys. D: Appl. Phys. 2009 , 42 , 045208 (11 pp) .

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