74
Views
72
CrossRef citations to date
0
Altmetric
Original Articles

A new study of critical layer thickness, stability and strain relaxation in pseudomorphic gexsi1-x strained epilayers

, , , &
Pages 1151-1167 | Received 04 Sep 1991, Accepted 02 Oct 1991, Published online: 13 Sep 2006

References

  • Alexander , H. and Haasen , P. 1968 . Solid-St. Phys. , 22 : 27 – 158 .
  • Bean , J. C. , Feldman , L. C. , Fiory , A. T. , Nakahara , S. and Robinson , I. K. 1984 . J. Vac. Sci. Technol. A , 2 : 436 – 440 .
  • Dodson , B. W. 1989 . Mater. Res. Soc. Symp. Proc. , 129 : 491
  • Dodson , B. W. and Tsao , J. Y. 1987 . Appl. Phys. Lett. , 51 : 1325
  • 1988 . I bid. , 52 : 852 Erratum
  • Fritz , I. J. 1987 . Appl. Phys. Lett. , 51 : 1080
  • Jain , S. C. and Totterdell , D. H. J. 1989 . A.E.R.E. Harwell report R-13640.
  • Jain , S. C. 1989 . Proc. of the Fifth International Workshop on the Physics of Semiconductor Devices . 1989 . Edited by: Khokle , W. S. and Jain , S. C. pp. pp. 3 – 12 . Delhi : Macmillan .
  • Jain , S. C. , Willis , J. R. and Bullough , R. 1990a . Adv. Phys. , 39 : 127 – 190 .
  • Jain , S. C. , Atkinson , A. and Khokle , W. S. 1990b . Invited lecture at the Fifth International Conference on Solid Films and Surfaces, Brown University, Providence R.I., U.S.A., August 13–17 1990 (to be published in Applied Surf. Science).
  • Kasper , E. 1986 . Surf. Sci. , 174 : 630 – 639 .
  • Kasper , E. , Herzog , H. J. , Daembkes , H. and Abstreiter , G. 1986 . Equally strained Si/SiGe superlattices on Si substrate, in Layered Structure and Epitaxy , Edited by: Gibson , J. M. , Osbourn , G. C. and Tromp , R. M. Vol. 56 , pp. 347 – 357 . Pittsburgh, Pennsylvania : Materials Research Soc. .
  • Kvam , E. P. , Maher , D. M. and Humphreys , C. J. 1990 . J. Mater. Res. , 5 : 1900
  • Matthews , J. W. and Blakeslee , A. E. 1974 . J. Cryst. Growth , 27 : 118 – 125 .
  • Nix , W. D. , Noble , D. B. and Turlo , J. F. MRS Spring Meeting, April 16–21, San Francisco, Cal.
  • Scott , M. P. , Laderman , S. S. , Kamins , T. I. , Rosner , S. J. , Nauka , K. , Noble , D. B. , Hoyt , J. L. , King , C. A. , Gronet , C. M. and Gibbons , J. F. 1989 . Mater. Res. Soc. Symp. Proc. , 130 : 179 – 184 .
  • Van der Merwe , J. H. 1972 . Surface Sci. , 31 : 198 – 228 .
  • Willis , J. R. , Jain , S. C. and Bullough , R. 1990 . Phil. Mag. A , 62 : 115 – 129 .
  • 1991 . Phil. Mag. A , 64 : 629 – 640 .

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.