High-fluence ion implantation of In into Al crystals: Formation and evolution of buried layers

References

• Alexander , D. E. and Birtcher , R. C. 1992 . “ Materials Research Society Symposium Proceedings ” . In Phase Formation and Modification by Beam-Solid Interactions , 235 545 Pittsburg, Pennsylvania : Materials Research Society .
   Google Scholar
• Andersen , H. H. 1984 . Ion Implantation and Beam Processing , Edited by: Williams , J. S. and Poate , J. M. New York : Academic Press .
   Google Scholar
• Andersen , H. H. and Bay , H. L. 1981 . Sputtering by Particle Bombardment , Edited by: Behrisch , R. Vol. 1 , Berlin : Springer .
   Google Scholar
• Andersen , H. H. and Johnson , E. 1995 . Nucl. Instrum. Meth. B , 106 : 480
   Web of Science ®Google Scholar
• Andersen , H. H. , Stenum , B. , S⊘rensen , T. and Whitlow , H. J. 1983 . Nucl. Instrum. Meth. , 209–210 : 487
   Google Scholar
• Bach , H. 1988 . J. non-crystalline Solids , 102 : 36
   Web of Science ®Google Scholar
• Betz , G. and Wehner , G. K. 1981 . Sputtering by Particle Bombardment , Edited by: Behrisch , R. Vol. 2 , Berlin : Springer .
   Google Scholar
• Brown , D. W. , Musket , R. G. and Munir , Z. A. 1989 . Appl. Phys. Lett. , 54 : 326 1990, Appl. Phys. Lett., 57, 2651.
   Google Scholar
• Brown , D. W. , Munir , Z. A. and Musket , R. G. 1991 . Nucl. Instr. Meth. B , 59–60 : 627.
   Google Scholar
• Daley , R. S. and Musket , R. G. 1993 . Nucl. Instr. Meth. B , 80–81 : 802
   Google Scholar
• Doolittle , L. R. 1986 . Nucl. Instr. Meth. B , 15 : 227
   Web of Science ®Google Scholar
• Duffy , A. G. , Clapham , L. , Whitton , J. L. and Ridgway , M. C. 1995 . Nucl. Instr. Meth. B , 106 : 504
   Google Scholar
• Hjemsted , K. 1991 . University of Copenhagen . MSc Thesis, in Danish
   Google Scholar
• Johansen , A. , Johnson , E. , Andersen , H. H. , Sarholt-Kristensen , L. and Olsen , M. 1994 . Nucl. Instrum. Meth. B , 89 : 178
   Google Scholar
• Johnson , E. , Hjemsted , K. , Schmidt , B. , Bourdelle , K. K. , Johansen , A. , Andersen , H. H. and Sarholt-Kristensen , S. 1992 . “ Phase Formation and Modification by Beam–Solid Interactions ” . In Materials Research Society Symposium Proceedings , Vol. 235 , 485 Pittsburg, Pennsylvania : Materials Research Society .
   Google Scholar
• Kruse , N. , Dybkjár , G. , Johansen , A. , Bourdelle , K. K. and Johnson , E. 1996 . Nucl. Instr. Meth. B , 118 : 645
   Google Scholar
• Mantl , S. 1992 . Mater. Sci. Rep. , 8 : 1 1993, Nucl. Instr. Meth. B, 80–81, 895; 1995, ibid., 106, 355.
   Google Scholar
• Meda , L. , Bertoni , S. , Cerofolini , G. F. and Spaggiari , C. 1993 . Nucl. Instr. Meth. B , 80–81 : 813
   Google Scholar
• Murray , J. L. 1986 . Binary Alloy Phase Diagrams , Edited by: Massalski , T. B. , Murray , J. L. , Bennett , L. H. and Baker , H. Vol. 1 , 121 Metals Park, Ohio : American Society for Metals .
   Google Scholar
• Ohkubo , M. , Suzuki , N. and Hioki , T. 1990 . Appl. Phys. Lett. , 56 : 2631
   Google Scholar
• Picraux , S. T. and Peercy , P. S. 1985 . Sci. Am. , 3 : 84
   Google Scholar
• Poulsen , J. R. , Horsewell , A. , Eldrup , M. , Johnson , E. and Johansen , A. 1994 . J. Phys. condens. Matter. , 6 : 5397
   Google Scholar
• Templier , C. , Garem , H. , Riviere , J. P. and Delafond , J. 1986 . Nucl. Instrum. Meth. B , 18 : 24
   Web of Science ®Google Scholar
• Thoft , N. B. , Bohr , J. , Buras , B. , Johnson , E. , Johansen , A. , Andersen , H. H. and Sarholt-Kristensen , L. 1994 . J. Phys. D , 28 : 539
   Google Scholar
• Trinkaus , H. and Mantl , S. 1993 . Nucl. Instr. Meth. B , 80–81 : 862
   Google Scholar
• Yamaguchi , H. , Hashimoto , I. , Mitsuya , H. , Nakamura , K. and Yagi , E. 1989 . J. nucl. Mater. , 161 : 164
   Web of Science ®Google Scholar
• Ziegler , J. F. , Biersack , J. P. and Littmark , U. 1985 . The Stopping and Ranges of Ions in Solids , Oxford : Pergamon .
   Google Scholar