Bonding structure and defects in wide band gap a-Si_1−xC_x:H films deposited in Hz diluted SiH₄ + CH₄ gas mixtures

References

• Alvarez , F. , Sebastiani , M. , Pozzilli , F. , Fiorini , P. and Evangelisti , F. 1992 . J. appl. Phys. , 71 : 267
   Web of Science ®Google Scholar
• Baker , S. H. , Spear , W. E. and Gibson , R. A. G. 1990 . Phil. Mag. B , 62 : 213
   Web of Science ®Google Scholar
• Bermeio , D. and Cardona , M. 1979 . J. non-crystalline Solids , 32 : 405
   Web of Science ®Google Scholar
• Beyer , W. , Hager , R. , Schmidbaur , H. and Winterling , G. 1989 . Appl. Phys. Lett. , 54 : 1666
   Web of Science ®Google Scholar
• Brodsky , M. H. , Cardona , M. and Cuomo , J. J. 1977 . Phys. Rev. B , 16 : 3556
   Web of Science ®Google Scholar
• Bullot , J. and Schmidt , P. 1987 . Phys. stat. Sol. B , 143 : 345
   Google Scholar
• Camargo , S. S. and Beyer , W. 1989 . J. non-crystalline Solids , 114 : 807
   Web of Science ®Google Scholar
• Camargo , S. S. , de Oliveira , M. L. , Pasa , A. A. and Gatts , C. 1992 . Amorphous Silicon Technology—1992 , Edited by: Schiff , E. A. , Thompson , M. J. , Madan , A. , Tanaka , K. and LeComber , P. G. Vol. 258 , 163 Pittsburgh, PA : Materials Research Society . edited by, p.
   Google Scholar
• Catherine , Y. and Turban , G. 1980 . Thin Solid Films , 70 : 101
   Web of Science ®Google Scholar
• Daey Ouwens , J. , Schropp , R. E. I. , Van der Werf , C. H. M. , Von der Linden , M. B. , Maree , C. H. M. , Van der Weg , W. F. , Rava , P. , Demichelis , F. , Pirri , C. F. and Tresso , E. 1993 . Amorphous Silicon Technology—1993 , Edited by: Schiff , E. A. , Thompson , M. J. , Madan , A. , Tanaka , K. and LeComber , P. G. Vol 297 , 61 Pittsburgh, PA : Materials Research Society . edited by, p.
   Google Scholar
• DellaSala , D. , Fiorini , P. , Frova , A. , Gregori , A. , Skumanich , A. and Amer , N. M. 1985 . J. non-crystalline Solids , 77/78 : 853
   Web of Science ®Google Scholar
• Demichelis , F. , Crovini , G. , Pirri , C. F. , Tresso , E. , Galloni , R. , Rizzoli , R. , Summonte , C. and Rava , P. 1995 . Solar Energy Materials and Solar Cells (in press).
   Google Scholar
• Demichelis , F. , Crovini , G. , Pirri , C. F. , Tresso , E. , Galloni , R. , Rizzoli , R. , Summonte , C. , Zignani , F. , Rava , P. and Madan , A. 1994 . Phil. Mag. B , 69 : 377
   Web of Science ®Google Scholar
• Demichelis , F. , Pirri , C. F. , Tresso , E. , Herremans , H. , Grevendonk , W. , Adriaenssens , G. J. , Amato , G. and Coscia , U. 1993 . Appl. Surf. Sci. , 70/71 : 664
   Web of Science ®Google Scholar
• Dillon , R. O. , Woollam , J. A. and Katkanant , V. 1984 . Phys. Rev. B , 29 : 3482
   Web of Science ®Google Scholar
• Dischler , B. 1987 . E-MRS Symp. Proc. , Edited by: Koidl , P. and Oelhafen , P. Vol. XVII , 189 Les Ulis , , France : Les Ed. de Phys. . edited by, p.
   Google Scholar
• Fang , C. , Gruntz , K. , Leyaud , L. and Cardona , M. 1980 . J. non-crystalline Solids , 35/36 : 255
   Web of Science ®Google Scholar
• Folsch , J. , Rubel , H. and Schade , H. 1992 . Appl. Phys. Lett. , 61 : 3029
   Web of Science ®Google Scholar
• Freeman , E. C. and Paul , W. 1978 . Phys. Rev. B , 18 : 4228
   Google Scholar
• Galloni , R. , Rizzoli , R. , Summonte , C. , Zignani , F. , Demichelis , F. , Crovini , G. , Pirri , C. F. , Tresso , E. and Rava , P. 1994a . EEC Photovoltaic Solar Energy Conf. Proceedings , Amsterdam, in press.
   Google Scholar
• Galloni , R. , Rizzoli , R. , Summonte , C. , Zignani , F. , Demichelis , F. , Giorgis , F. , Pirri , C. F. , Tresso , E. , Rava , P. , Ambrosone , G. , Catalanotti , C. , Coscia , U. , Madan , A. , Rigato , V. and Dellamea , G. 1994b . Amorphous Silicon Technology—1994 , Pittsburgh, PA : Materials Research Society), in press. . (
   Google Scholar
• Gambino , R. J. and Thompson , J. A. 1970 . Solid State Commun. , 39 : 15
   Google Scholar
• Guivarch , A. , Richard , J. , Lecontellec , M. , Ligeon , E. and Fontenille , J. 1980 . J. appl. Phys. , 51 : 2167
   Web of Science ®Google Scholar
• Hamakawa , Y. 1984 . Japan Annual Review in Electronics, Computers and Telecommunications, Amorphous Semiconductor Technology and Devices , Edited by: Hamakawa , Y. Vol. 6 , Amsterdam, New York, Oxford: Ohm-lha and North-Holland). : Tokyo . edited by (
   Google Scholar
• Hamakawa , Y. , Kruangam , D. , Toyama , T. , Yoshimi , M. , Paasche , S. and Okamoto , H. 1989 . Optoelectron. Devices Technol. , 4 : 281
   Google Scholar
• Hicks , S. E. , Fitzgerald , A. G. and Baker , S. H. 1990 . Phil. Mag. B , 62 : 193
   Web of Science ®Google Scholar
• Hollingworth , R. E. , Bath , P. K. and Madan , A. 1987 . Proc. of the 19th IEEE Photovoltaic Specialists Conference , 684 New Orleans, Lousiana : New York IEEE . , p.
   Google Scholar
• Katayama , Y. , Usami , K. and Shimada , T. 1981 . Phil. Mag. B , 43 : 283
   Web of Science ®Google Scholar
• Koidl , P. , Wild , C. , Locher , R. and Sah , R. E. 1991 . Diamond and Diamond-like Films and Coatings , NATO ASI Series B Physics Edited by: Clausing , R. E. , Horton , L. L. , Angus , J. C. and Koidl , P. Vol. 266 , 243 New York : Plenum . edited by, p.
   Google Scholar
• Kruangam , D. , Ends , T. , Okamoto , H. and Hamakawa , Y. 1985 . Jpn. J. appl. Phys. , 24 , L806.
   Google Scholar
• Li , Y. M. , Catalano , A. and Fieselmann , B. F. 1992 . Amorphous Silicon Technology—1992 , Edited by: Schiff , E. A. , Thompson , M. J. , Madan , A. , Tanaka , K. and LeComber , P. G. Vol. 258 , 923 Pittsburgh, PA : Materials Research Society . edited by, p.
   Google Scholar
• Li , Y. M. , Fieselmann , B. F. and Catalano , A. 1991 . Proc. 22nd PVSC 1231 ,p.
   Google Scholar
• Madan , A. , Rava , P. , Schropp , R. E. I. and VonRodern , B. 1993 . Appl. Surf. Sci. , 70/71 : 216
   Google Scholar
• Mahan , A. H. , Mascarenhas , A. , Williamson , D. L. and Crandall , R. S. 1988 . Amorphous Silicon Technology , Edited by: Schiff , E. A. , Thompson , M. J. , Madan , A. , Tanaka , K. and LeComber , P. G. Vol. 118 , 641 Pittsburgh, PA : Materials Research Society . edited by, p.
   Google Scholar
• Matsuda , A. and Tanaka , K. 1987 . J. non-crystalline Solids , 97/98 : 1367
   Web of Science ®Google Scholar
• Matsuda , A. , Yamaoka , T. , Wolff , S. , Koyama , M. , Imanishi , Y. , Kataoka , H. , Matsuura , H. and Tanaka , K. 1986 . J. appl. Phys. , 60 : 4025
   Web of Science ®Google Scholar
• Mohr , W. C. , Tsai , C. C. and Street , R. A. 1986 . Amorphous Silicon Technology , Edited by: Schiff , E. A. , Thompson , M. J. , Madan , A. , Tanaka , K. and LeComber , P. G. Vol. 70 , 319 Pittsburgh, PA : Materials Research Society . edited by, p.
   Google Scholar
• Robertson , J. 1992 . Phil. Mag. B , 66 : 615
   Web of Science ®Google Scholar
• Schmidt , M. P. , Solomon , I. and Tran-Quoc , H. 1985 . J. non-crystalline Solids , 77/78 : 849
   Web of Science ®Google Scholar
• Tawada , J. , Tsuge , K. , Kondo , M. , Okamoto , H. and Hamakawa , Y. 1982 . J. appl. Phys. , 53 : 5273
   Web of Science ®Google Scholar
• Vincenzoni , R. , Masini , G. , Leo , G. , Guattari , G. and Galluzzi , F. 1993 . Amorphous Silicon Technology—1993 , Edited by: Schiff , E. A. , Thompson , M. J. , Madan , A. , Tanaka , K. and LeComber , P. G. Vol. 297 , 687 Pittsburgh, PA : Materials Research Society . edited by, p.
   Google Scholar
• Wieder , H. , Cardona , M. and Guarnieri , C. R. 1979 . Phys. Stat. Sol. B , 92 : 999
   Google Scholar