6
Views
0
CrossRef citations to date
0
Altmetric
Original Articles

Modification of a surface oxide due to 4he ion bombardment

&
Pages 183-186 | Received 28 Jul 1981, Published online: 19 Aug 2006

References

  • Picraux , S. T. 1975 . New Uses of Ion Accelerators , Edited by: Ziegler , J. F. p. 229 New York : Plenum .
  • Alexander , R. B. , Dorenbusch , W. E. and Lo , W. J. Appl. Phys. , to be published
  • Abel , F. , Ansel , G. , Bruneaux , M. , Cohen , C. and L'Hoir , A. 1975 . Phys. Rev. , B12 : 4617
  • 1976 . B13 : 993
  • Chu , W. K. p. 135 in Ref. 1
  • Mc Glashan , S. R. L. , King , R. M. and Parker , E. H. C. 1979 . J. Vac. Sci. Technol. , 16 : 1174

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.