Thermo-elasto-plasto-dynamics of ultrafast optical ablation in polycrystalline metals. Part II: Response and damage evaluation

References

• T. A. Labutin, V. N. Lednev, A. A. Ilyin, and A. M. Popov, “Femtosecond laser-induced breakdown spectroscopy,” J. Anal. At. Spectrom., vol. 31, no. 1, pp. 90–118, 2016. DOI: 10.1039/C5JA00301F.
   Web of Science ®Google Scholar
• D. Bäuerle, “Ultrashort-Pulse Laser Ablation,” in Laser Processing and Chemistry; Springer, 2011; pp. 279–313.
   Google Scholar
• X. Zhao and Y. C. Shin, “A two-dimensional comprehensive hydrodynamic model for femtosecond laser pulse interaction with metals,” J. Phys. D: Appl. Phys., vol. 45, no. 10, pp. 105201, 2012. DOI: 10.1088/0022-3727/45/10/105201.
   Web of Science ®Google Scholar
• G. D. Tsibidis, E. Stratakis and K. E. Aifantis, “Thermoplastic deformation of silicon surfaces induced by ultrashort pulsed lasers in submelting conditions,” J. Appl. Phys., vol. 111, no. 5, pp. 053502, 2012. DOI: 10.1063/1.3688020.
   Web of Science ®Google Scholar
• R. Beuton, et al., “Thermo-elasto-plastic simulations of femtosecond laser-induced multiple-cavity in fused silica,” Appl. Phys. A, vol. 124, no. 4, pp. 324, 2018. DOI: 10.1007/s00339-018-1743-x.
   Web of Science ®Google Scholar
• B. S. Yilbas, “Short-pulse laser heating of gold-chromium layers: thermo-elasto-plastic analysis,” J. Phys. D: Appl. Phys, vol. 35, no. 11, pp. 1210–1217, 2002. DOI: 10.1088/0022-3727/35/11/318.
   Web of Science ®Google Scholar
• M. Dirscherl, G. Esser and M. Schmidt, “Ultrashort pulse laser bending,” JLMN, vol. 1, no. 1, pp. 54–60, 2006. DOI: 10.2961/jlmn.2006.01.0011.
   Google Scholar
• X. Qi, L. Liu, C. S. Suh and R. Chona, “Elasto-viscoplastic wave thermometry for single crystalline silicon processing,” Int. J. Appl. Mech., vol. 02, no. 04, pp. 827–849, 2010. VolNo DOI: 10.1142/S1758825110000779.
   Google Scholar
• X. Mao and C. S. Suh, “Generalized thermo-elastodynamics for polycrystalline metallic thin films in response to ultrafast laser heating,” J. Thermophys. Heat Transfer, vol. 33, no. 1, pp. 106–111, 2019. DOI: 10.2514/1.t5429.
   Web of Science ®Google Scholar
• X. Mao and C. S. Suh, “Ultrashort pulse-induced elastodynamics in polycrystalline materials. Part I: Model validation,” J. Therm. Stresses, vol. 42, no. 3, pp. 374–387, 2019. DOI: 10.1080/01495739.2018.1524729.
   Web of Science ®Google Scholar
• E. G. Gamaly, A. V. Rode, B. Luther-Davies and V. T. Tikhonchuk, “Ablation of solids by femtosecond lasers: ablation mechanism and ablation thresholds for metals and dielectrics,” Phys. Plasmas, vol. 9, no. 3, pp. 949–957, 2002. DOI: 10.1063/1.1447555.
   Web of Science ®Google Scholar
• Bower, A. F. Applied Mechanics of Solids. Boca Raton: CRC Press, 2009. DOI: 10.1201/9781439802489
   Google Scholar
• Y. Oh, C. S. Suh and H.-J. Sue, “On failure mechanisms in flip chip assembly—Part 1: short-time scale wave motion,” J. Electron. Packag., vol. 130, no. 2, pp. 021008, 2008. DOI: 10.1115/1.2912188.
   Web of Science ®Google Scholar
• X. Qi and C. S. Suh, “Ultrafast laser-induced elastodynamics in single crystalline silicon part II: near-field response,” J. Therm. Stresses, vol. 32, no. 5, pp. 494–511, 2009. DOI: 10.1080/01495730802637399.
   Web of Science ®Google Scholar
• X. Mao and C. S. Suh, “Ultrashort pulse induced elastodynamics in polycrystalline materials. Part II: thermal–mechanical response,” J. Therm. Stresses, vol. 42, no. 3, pp. 388–400, 2019. DOI: 10.1080/01495739.2018.1524730.
   Web of Science ®Google Scholar
• Z. Branigan and C. S. Suh, “Power density – an alternative approach to quantifying fatigue failure,” JVTSD, vol. 2, no. 4, pp. 307–326, 2018. DOI: 10.5890/JVTSD.2018.12.002.
   Google Scholar
• M. Nagaraj and C. S. Suh, “On short time scale stress wave phenomena and initiation of mechanical faults in flip chip configurations,” IEEE Trans. Device Mater. Relib., vol. 5, no. 2, pp. 224–230, 2005. DOI: 10.1109/TDMR.2005.846828.
   Web of Science ®Google Scholar
• D. J. Hwang, C. P. Grigoropoulos and T. Y. Choi, “Efficiency of silicon micromachining by femtosecond laser pulses in ambient air,” J. Appl. Phys., vol. 99, no. 8, pp. 083101, 2006. DOI: 10.1063/1.2187196.
   Web of Science ®Google Scholar
• J. Krüger and W. Kautek, “The femtosecond pulse laser: a new tool for micromachining,” Laser Phys.-Lawrence, vol. 9, pp. 30–40, 1999.
   Web of Science ®Google Scholar
• L. Jiang and H.-L. Tsai, “Prediction of crater shape in femtosecond laser ablation of dielectrics,” J. Phys. D: Appl. Phys., vol. 37, no. 10, pp. 1492–1496, 2004. DOI: 10.1088/0022-3727/37/10/012.
   Web of Science ®Google Scholar