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Journal of the Chinese Institute of Engineers Volume 28, 2005 - Issue 4
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Short paper

The high‐speed measurement of a partial area imaging system applied to photoresist development processing

Chern‐Sheng Lin Department of Automatic Control Engineering, Feng Chia University, Taichung, Taiwan 407, R.O.C. Phone: 886–4–24517250 ext. 3929 Fax: 886–4–24517250 ext. 3929 E-mail: [email protected])
,
Yun‐Long Lay Department of Electronic Engineering, Natinoal Chin‐Yi Institute of Technology, Taichung, Taiwan 411, R.O.C.
,
Shi‐Xiang Chan Department of Automatic Control Engineering, Feng Chia University, Taichung, Taiwan 407, R.O.C.
,
Chien‐Wa Ho Department of Electro‐Optical Engineering, National United University, Miaoli, Taiwan 360, R.O.C.
&
Yih‐Chih Chiou Department of Mechanical Engineering and Institute of Aeronautics and Astronautics, Chung Hua University, Hsinchu, Taiwan 300, R.O.C.
Pages 721-726 | Received 21 Apr 2004, Accepted 23 Sep 2004, Published online: 04 Mar 2011

Reference

  • Chang , R. S. , Lin , C. S. and Hu , C. P. 1995 . “Fuzzy Analysis of the Linear Equivalent for Fabricating a HOE in Photoresist,” . Japanese Journal of Applied Physics , 34 ( 3 ) : 1554 – 1560 .
  • Dentinger , P. M. , Krafcik , K. L. , Simison , K. L. , Janek , R. P. and Hachman , J. 2002 . “High Aspect Ratio Patterning with a Proximity Ultraviolet Source,” . Microelectronic Engineering , 61 : 1001 – 1007 .
  • Lanarre , P. A. , Mctaggart , R. A. and Mozzi , R. L. 1988 . “Contrast Tuning, Image Reversal, and Automated Track Developing,” . IEEE Transactions on Semiconductor Manufacturing , 1 ( 3 ) : 98 – 104 .
  • Lin , C. S. 2000 . “Dichromated Gelatin Hologram Using Digital Image Processing Technology to Optimise Processing,” . The Imaging Science Journal , 48 ( 2 ) : 93 – 105 .
  • Lin , C. S. and Chang , R. S. 1997 . “Digital Image Processing for Evaluating the Characteristics of the Microstructure of a Holographic Plate,” . Lasers and optics Technology , 29 ( 2 ) : 97 – 102 .
  • Lin , C. S. , Chang , R. S. and Hu , Y. J. 1994 . “Computer Simulation and Image Processing for Investigating the Shape Function of a Holographic Microlens,” . Optical Memory and Neural Networks , 3 ( 3 ) : 343 – 352 .
  • Lin , G. R. 1999 . “Dynamical Mapping and End‐Point Detection of Photoresist Development by Using Plastic‐Fiber‐Bundle Probe Array,” . IEEE Transactions on Instrumentation and Measurement , 48 ( 6 ) : 1319 – 1323 .
  • Morton , S. L. , Degertekin , F. L. and Khuri‐Yakub , B. T. 1999 . “Ultrasonic Sensor for Photoresist Process Monitoring,” . IEEE Transactions on Semiconductor Manufacturing , 12 ( 3 ) : 332 – 339 .
  • Corresponding author. (Tel: 886–4–24517250 ext. 3929; Fax: 886–4–24519951; Email: [email protected])

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