The effects of deposition temperatures on the characteristics of nitrogenated carbon films deposited on p‐type silicon substrates by thermal chemical vapor deposition

References

• Baydogan , N. D. 2004 . “Evaluation of Optical Properties of the Amorphous Carbon Film on Fused Silica” . Materials Science and Engineering B , 107 ( 1 ) : 70 – 77 .
   Google Scholar
• Cancado , L. G. , Takai , K. , Enoki , T. , Endo , M. , Kim , Y. A. , Mizusaki , H. , Jorio , A. , Coelho , L. N. , Paniago , R. M. and Pimenta , M. A. 2006 . “General Equation for the Determination of the Crystallite Size La of Nanographite by Raman Spectroscopy,” . Applied Physics Letters , 88 ( 16 ) : 163106
   Web of Science ®Google Scholar
• Chen , C. W. and Robertson , J. 1999 . “Doping Mechanism in Tetrahedral Amorphous Carbon” . Carbon , 37 ( 5 ) : 839 – 842 .
   Google Scholar
• Chen , S. S. , Shiue , S. T. , Tang , W. C. and Lin , H. Y. 2007a . “Effects of Annealing on the Properties of Hermetically Carbon‐Coated Optical Fibers Prepared by Plasma Enhanced Chemical Vapor Deposition Method” . Optical Engineering , 46 ( 3 ) : 035008
   Google Scholar
• Chen , S. S. , Shiue , S. T. , Wu , Y. H. and Cheng , K. J. 2007b . “Effects of Deposition Temperature on the Properties of Hermetically Carbon‐Coated Optical Fibers Prepared by Thermal Chemical Vapor Deposition” . Surface and Coating Technology , 202 ( 4–7 ) : 798 – 803 .
   Google Scholar
• Chen , S. S. , Shiue , S. T. , Cheng , K. J. , Chen , P. Y. and Lin , H. Y. 2008 . “Minimization of Conical Particles in Carbon Coatings of Optical Fibers Prepared by Thermal Chemical Vapor Deposition” . Optical Engineering , 47 ( 4 ) : 045005
   Google Scholar
• Chu , R. S. and Shiue , S. T. 2008 . “Effects of Radio Frequency Powers on the Characters of Amorphous a‐C:N/p‐Si Photovoltaic Solar Cells Prepared by Plasma Enhanced Chemical Vapor Deposition,” . Surface and Coating Technology , 202 ( 22–23 ) : 5364 – 5366 .
   Google Scholar
• Conway , N. M. J. , Ferrari , A. C. , Flewitt , A. J. , Roberts , J. , Milne , W. I. , Tagliaferro , A. and Beyer , W. 2000 . “Defect and Disorder Reduction by Annealing in Hydrogenated Tetrahedral Amorphous Carbon” . Diamond and Related Materials , 9 ( 3–6 ) : 765 – 770 .
   Google Scholar
• Dû , G. L. , Celini , N. , Bergaya , F. and Epaillard , F. P. 2007 . “RF Plasma‐Polymerization of Acetylene: Correlation Between Plasma Diagnostics and Deposit Characteristic” . Surface and Coating Technology , 201 ( 12 ) : 5815 – 5821 .
   Google Scholar
• Fanchini , G. , Tagliaferro , A. , Popescu , B. and Davis , E. A. 2002 . “Paramagnetic Properties and Hydrogen‐Related Structural Relaxation Effects in Magnetron‐Sputtered a‐C:H Thin Films,” . Journal of Non‐Crystalline Solids , 299–302 : 846 – 851 . Part 2
   Google Scholar
• Fang , T. H. and Chang , W. J. 2003 . “Effect of Freon Flow Rate on Tin Oxide Thin Films Deposited by Chemical Vapor Deposition” . Applied Surface Science , 220 ( 1–4 ) : 175 – 180 .
   Google Scholar
• Ferrari , A. C. and Robertson , J. 2000 . “Interpretation of Raman Spectra of Disordered and Amorphous Carbon” . Physics Review B , 61 ( 20 ) : 14095 – 14107 .
   Web of Science ®Google Scholar
• Hayashi , Y. , Ishikawa , S. , Soga , T. , Umeno , M. and Jimbo , T. 2003 . “Photovoltaic Characteristics of Boron‐Doped Hydrogenated Amorphous Carbon on n‐Si Substrate Prepared by r.f. Plasma‐Enhanced CVD Using Trimethylboron” . Diamond and Related Materials , 12 ( 3–7 ) : 687 – 690 .
   Google Scholar
• Hsieh , W. J. , Lai , S. H. , Chan , L. H. , Chang , K. L. and Shih , H. C. 2005 . “Cathodoluminescence and Electron Field Emission of Boron‐Doped a‐C:N Films” . Carbon , 43 ( 4 ) : 820 – 826 .
   Google Scholar
• Kleber , R. , Weiler , M. , Kruger , A. , Sattel , S. , Kunz , G. , Jung , K. and Ehrhardt , H. 1993 . “Influence of Ion Energy and Flux Composition on the Properties of Plasma‐Deposited Amorphous Carbon and Amorphous Hydrogenated Carbon Films” . Diamond and Related Materials , 2 ( 2–4 ) : 246 – 250 .
   Google Scholar
• Krishna , K. M. , Umeno , M. , Nukaya , Y. , Soga , T. and Jimbo , T. 2002 . “Photovoltaic and Spectral Photoresponse Characteristics of n‐C/p‐C Solar Cell on a P‐silicon Substrate” . Applied Physics Letters , 77 ( 10 ) : 1472 – 1474 .
   Google Scholar
• Lin , H. C. , Shiue , S. T. , Chou , Y. M. , Lin , H. Y. and Wu , T. C. 2007 . “Effect of Substrate Temperature on the Properties of Carbon‐Coated Optical Fibers Prepared by Plasma Enhanced Chemical Vapor Deposition” . Thin Solid Films , 516 ( 2–4 ) : 114 – 118 .
   Google Scholar
• Liu , Y. , Liu , C. , Chen , Y. , Tzeng , Y. , Tso , P. and Lin , I. 2004 . “Effects of Hydrogen Additive on Microwave Plasma CVD of Nanocrystalline Diamond in Mixtures of Argon and Methane” . Diamond and Relatated Materials , 13 ( 4–8 ) : 671 – 678 .
   Google Scholar
• Muller , A. , Ghosh , M. , Sonnenschein , R. and Woditsch , P. 2006 . “Silicon for Photovoltaic Applications” . Materials Science and Engineering B , 134 ( 2–3 ) : 257 – 262 .
   Google Scholar
• Paterson , M. J. 1998 . “An Investigation of the Role of Hydrogen in Ion Beam Deposited a‐C:H” . Diamond Related Materials , 7 ( 6 ) : 908 – 915 .
   Google Scholar
• Rusop , M. , Tian , X. M. , Mominuzzaman , S. M. , Soga , T. , Jimbo , T. and Umeno , M. 2005 . “Photoelectrical Properties of Pulsed Laser Deposited Boron Doped P‐carbon/n‐silicon and Phosphorus Doped N‐carbon/p‐silicon Heterojunction Solar Cells” . Solar Energy , 78 ( 3 ) : 406 – 415 .
   Google Scholar
• Rusop , M. , Omer , A. M. M. , Adhikari , S. , Adhikary , S. , Uchida , H. , Soga , T. , Jimbo , T. and Umeno , M. 2006 . “Effects of Annealing Temperature on the Optical, Bonding, Structural and Electrical Properties of Nitrogenated Amorphous Carbon Thin Films Grown by Surface Wave Microwave Plasma Chemical Vapor Deposition” . Journal of Materials Science , 41 ( 2 ) : 537 – 547 .
   Google Scholar
• Shiue , S. T. , Hsiao , H. H. , Shen , T. Y. , Lin , H. C. and Lin , K. M. 2005 . “Mechanical Strength and Thermally Induced Stress Voids of Carbon‐Coated Optical Fibers Prepared by Plasma Enhanced Chemical Vapor Deposition Method With Different Hydrogen/Methane Ratio” . Thin Solid Films , 483 ( 1–2 ) : 140 – 146 .
   Google Scholar
• Swiatek , Z. , Bełtowska , E. , Maziarz , W. and Krok , F. 2003 . “Characterization and Properties of a Modified Si Solar Cell Emitter by a Porous Si Layer” . Materials Science and Engineering B , 101 ( 1–3 ) : 291 – 296 .
   Google Scholar
• Tuinstra , F. and Koenig , J. L. 1970 . “Raman Spectrum of Graphite” . Journal of Chemical Physics , 53 ( 3 ) : 1126 – 1130 .
   Web of Science ®Google Scholar
• Corresponding author. (Tel: +886–4–22857211; Fax: +886–4–22857017; Email: [email protected])
   Google Scholar