Structure and properties of GLC films deposited by PEMS

References

• Y. Wang, J. Pu, J. Wang, J. Li, J. Chen and Q. Xue: ‘Interlayer design for the graphite-like carbon film with high load-bearing capacity under sliding-friction condition in water’, Appl. Surf. Sci., 2014, 311, (9), 816–824. doi: 10.1016/j.apsusc.2014.05.172
   Web of Science ®Google Scholar
• M. Huang, X. Zhang, P. Ke and A. Wang: ‘Graphite-like carbon films by high power impulse magnetron sputtering’, Appl. Surf. Sci., 2013, 283, (14), 321–326. doi: 10.1016/j.apsusc.2013.06.109
   Web of Science ®Google Scholar
• S. Neuville and A. Matthews: ‘A perspective on the optimisation of hard carbon and related coatings for engineering applications’, Thin Solid Films, 2007, 515, (17), 6619–6653. doi: 10.1016/j.tsf.2007.02.011
   Web of Science ®Google Scholar
• J. Vlček, P. Kudláček, K. Burcalová and J. Musil: ‘High-power pulsed sputtering using a magnetron with enhanced plasma confinement’, J. Vac. Sci. Technol. A: Vac. Surf. Films, 2007, 25, (1), 42–47. doi: 10.1116/1.2388954
   Web of Science ®Google Scholar
• P. Gao, J. Xu, P. Yong, W. Ding, D. Wang, X. Deng and C. Dong: ‘Deposition of silicon carbon nitride thin films by microwave ECR plasma enhanced unbalance magnetron sputtering’, Surf. Coat. Technol., 2007, 201, (9), 5298–5301. doi: 10.1016/j.surfcoat.2006.07.197
   Web of Science ®Google Scholar
• F. Wen, Y. Meng, Z. Ren and X. Shu: ‘Microstructure, hardness and corrosion resistance of ZrN films prepared by inductively coupled plasma enhanced RF magnetron sputtering’, Plasma Sci. Technol., 2008, 10, (2), 170–175. doi: 10.1088/1009-0630/10/2/25
   Web of Science ®Google Scholar
• F. Liang, H. Wang and C. Zou: ‘Effects of ion source voltages on the composition, hardness, and temperature-dependent tribological properties of Ti-Al-Si-N nanocomposite coatings’, Jpn. J. Appl. Phys., 2014, 53, (7), 1190–1200. doi: 10.7567/JJAP.53.075503
   Web of Science ®Google Scholar
• A. C. Ferrari and J. Robertson: ‘Interpretation of Raman spectra of disordered and amorphous carbon’, Phys. Rev. B, 2000, 61, (20), 14095–14107. doi: 10.1103/PhysRevB.61.14095
   Web of Science ®Google Scholar
• P. K. Chu and L. Li: ‘Characterization of amorphous and nanocrystalline carbon films’, Mater. Chem. Phys., 2006, 96, 253–277. doi: 10.1016/j.matchemphys.2005.07.048
   Web of Science ®Google Scholar
• Y. Wang, H. Li, X. Liu, L. Ji, Y. Wu, Y. Lv, Y. Y. Fu, H. Zhou and J. Chen: ‘Friction and wear properties of graphite-like carbon films deposited on different substrates with a different interlayer under high hertzian contact stress’, Tribol. Lett., 2012, 46, (3), 243–254. doi: 10.1007/s11249-012-9943-6
   Web of Science ®Google Scholar
• A. Leyland and A. Matthews: ‘On the significance of the H/E ratio in wear control: a nanocomposite coating approach to optimised tribological behavior’, Wear, 2000, 246, 1–11. doi: 10.1016/S0043-1648(00)00488-9
   Web of Science ®Google Scholar
• Y. T. Pei, P. Huizenga, D. Galvan and J. T. M. De Hosson: ‘Breakdown of the Coulomb friction law in TiC/a-C:H nanocomposite coatings’, J. Appl. Phys., 2006, 100, (11), 114309-1–114309-9. doi: 10.1063/1.2396762
   Web of Science ®Google Scholar
• D. Galvan, Y. T. Pei and J. Th. M. De Hosson: ‘Influence of deposition parameters on the structure and mechanical properties of nanocomposite coatings’, Surf. Coat. Technol., 2006, 201, 590–598. doi: 10.1016/j.surfcoat.2005.12.007
   Web of Science ®Google Scholar
• S. Yang, D. Camino, A. H. S. Jones and D. G. Teer: ‘Deposition and tribological behaviour of sputtered carbon hard coatings’, Surf. Coat. Technol., 2000, 124, 110–116. doi: 10.1016/S0257-8972(99)00634-9
   Web of Science ®Google Scholar
• D. Martínez-Martínez, C. López-Cartes, A. Fernández and J. C. Sánchez-López: ‘Influence of the microstructure on the mechanical and tribological behavior of TiC/a-C nanocomposite coatings’, Thin Solid Films, 2009, 517, (5), 1662–1671. doi: 10.1016/j.tsf.2008.09.091
   Web of Science ®Google Scholar
• Y. T. Pei, C. Q. Chen, K. P. Shaha, J. T. M. D. Hosson, J. W. Bradley, S. A. Voronin and M. Čada: ‘Microstructural control of TiC/a-C nanocomposite coatings with pulsed magnetron sputtering’, Acta Mater., 2008, 56, (4), 696–709. doi: 10.1016/j.actamat.2007.10.025
   Web of Science ®Google Scholar
• Y. T. Pei, D. Martinez-Martinez, J. C. Sanchez-Lopez, K. P. Shaha and J. Th. M. De Hosson: ‘Effect of process parameters on mechanical and tribological performance of pulsed-DC sputtered TiC/a-C:H nanocomposite films’, Surf. Coat. Technol., 2010, 205, (7), 2633–2642. doi: 10.1016/j.surfcoat.2010.10.020
   Web of Science ®Google Scholar
• L. H. Li, X. B. Tian, P. K. Chu, Y. H. Zhang, X. M. Cui and H. Q. Zhang: ‘Growth and nucleation of diamond-like carbon (DLC) film on aluminum’, Nucl. Instrum. Methods Phys. Res. Sect. B: Beam Interact. Mater. Atoms, 2003, 206, (03), 691–695. doi: 10.1016/S0168-583X(03)00827-9
   Web of Science ®Google Scholar
• X. L. Bui, Y. T. Pei and J. Th. M. De Hosson: ‘Magnetron reactively sputtered Ti-DLC coatings on HNBR rubber: The influence of substrate bias’, Surf. Coat. Technol., 2008, 202, (20), 4939–4944. doi: 10.1016/j.surfcoat.2008.04.078
   Web of Science ®Google Scholar
• M. Fyta and P. C. Kelires: ‘Stress variations near surfaces in diamond-like amorphous carbon’, J. Non-Crystalline Solids, 2000, 266–269, (3), 760–764. doi: 10.1016/S0022-3093(99)00810-8
   Web of Science ®Google Scholar
• J. Robertson: ‘Deposition mechanisms for promoting sp3 bonding in diamond-like carbon’, Diam. Relat. Mater., 1993, 2, (5–7), 984–989. doi: 10.1016/0925-9635(93)90262-Z
   Web of Science ®Google Scholar
• J. Robertson: ‘Diamond-like amorphous carbon’, Mater. Sci. Eng. R: Rep., 2002, 37, (7A), 129–281. doi: 10.1016/S0927-796X(02)00005-0
   Web of Science ®Google Scholar
• J. Chen, Y. Wang, H. Li, L. Ji, Y. Wu, Y. Lv, X. Liu, Y. Fu and H. Zhou: ‘Microstructure, morphology and properties of titanium containing graphite-like carbon films deposited by unbalanced magnetron sputtering’, Tribol. Lett., 2013, 49, (1), 47–59. doi: 10.1007/s11249-012-0041-6
   Web of Science ®Google Scholar
• Y. Wang, L. Wang, J. Li, J. Chen and Q. Xue: ‘Tribological properties of graphite-like carbon coatings coupling with different metals in ambient air and water’, Tribol. Int., 2013, 60, (7), 147–155. doi: 10.1016/j.triboint.2012.11.014
   Web of Science ®Google Scholar
• M. J. Mosayebi and S. R. Hosseini: ‘Structural and tribological properties of TiC-DLC coatings deposited by RCAE-PVD at various bias voltages’, Surf. Eng., 2015, 31, (2), 96–102. doi: 10.1179/1743294414Y.0000000395
   Web of Science ®Google Scholar
• Y. Wang, L. Wang and Q. Xue: ‘Improving the tribological performances of graphite-like carbon films on Si3N4 and SiC by using Si interlayers’, Appl. Surf. Sci., 2011, 257, (23), 10246–10253. doi: 10.1016/j.apsusc.2011.07.030
   Web of Science ®Google Scholar
• Y. Wang, H. Li, L. Ji, X. Liu, Y. Wu, H. Zhou and J. Chen: ‘Superior tribological properties of an amorphous carbon film with a graphite-like structure’, Chin. Phys. B, 2012, 21, (1), 320–328.
   Google Scholar
• S. Wang, F. Wang, Z. Liao, Q. Wang, R. Tyagi and W. Liu: ‘Tribological behaviour of titanium alloy modified by carbon–DLC composite film’, Surf. Eng., 2015, 31, (12), 934–941. doi: 10.1179/1743294414Y.0000000452
   Web of Science ®Google Scholar
• X. T. Zeng, S. Zhang, X. Z. Ding and D. G. Teer: ‘Comparison of three types of carbon composite coatings with exceptional load-bearing capacity and high wear resistance’, Thin Solid Films, 2002, 420–421, (47), 366–370. doi: 10.1016/S0040-6090(02)00840-4
   Web of Science ®Google Scholar