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Surface Engineering Volume 36, 2020 - Issue 5: Special Issue: Processing
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Research Articles

Comparison of the effect of arched and through magnetic field configurations in cathodic arc deposition

Jalal Shiravi KhoozaniDepartment of Malek, Ashtar University of Technology, Tehran, Iran
,
Seyed Hojjatollah HosseiniDepartment of Malek, Ashtar University of Technology, Tehran, IranCorrespondence[email protected]
&
Mohammadreza Ebrahimi FordoeiDepartment of Malek, Ashtar University of Technology, Tehran, IranORCID Iconhttps://orcid.org/0000-0003-0930-3297
ORCID Icon
Pages 547-552 | Received 28 May 2019, Accepted 05 Aug 2019, Published online: 17 Sep 2019

References

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  • Lang WC, Xiao JQ, Gong J, et al. Study on cathode spot motion and macroparticles reduction in axisymmetric magnetic field-enhanced vacuum arc deposition. Vacuum. 2010;84(9):1111–1117. doi: 10.1016/j.vacuum.2010.01.037
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  • Boxman RL, Goldsmith S. Macroparticle contamination in cathodic arc coatings: generation, transport and control. Surf Coatings Technol. 1992;52(1):39–50. doi: 10.1016/0257-8972(92)90369-L
  • Ertürk E, Heuvel HJ, Dederichs HG. Comparison of the steered arc and random arc techniques. Surf Coatings Technol. 1989;39–40:455–464. doi: 10.1016/S0257-8972(89)80007-6
  • Ehiasarian AP, Hovsepian PE, New R, et al. Influence of steering magnetic field on the time-resolved plasma chemistry in cathodic arc discharges. J Phys D Appl Phys. 2004;37(15):2101–2106. doi: 10.1088/0022-3727/37/15/008
  • Steffens HD, Mack M, Moehwald K, et al. Reduction of droplet emission in random arc technology. Surf Coatings Technol. 1991;46(1):65–74. doi: 10.1016/0257-8972(91)90150-U

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