285
Views
0
CrossRef citations to date
0
Altmetric
Articles

Comparative study of perhydropolysilazane protective films

ORCID Icon, ORCID Icon, ORCID Icon & ORCID Icon
Pages 769-777 | Received 20 Sep 2022, Accepted 01 Dec 2022, Published online: 21 Dec 2022

References

  • Prager L, Dierdorf A, Liebe H, et al. Conversion of perhydropolysilazane into a SiOx network triggered by vacuum ultraviolet irradiation: access to flexible, transparent barrier coatings. Chem – Eur J. 2007;13(30):8522–8529. doi:10.1002/CHEM.200700351.
  • Prager L, Helmstedt U, Herrnberger H, et al. Photochemical approach to high-barrier films for the encapsulation of flexible laminary electronic devices. Thin Solid Films. 2014;570:87–95. doi:10.1016/J.TSF.2014.09.014.
  • Kim D, Jeon GG, Kim JH, et al. Design of a flexible thin-film encapsulant with sandwich structures of perhydropolysilazane layers. ACS Appl Mater Interf. 2022;14(30):34678–34685. doi:10.1021/acsami.2c06699.
  • Wang Y, Ding G, Mao JY, et al. Recent advances in synthesis and application of perovskite quantum dot based composites for photonics, electronics and sensors. Sci Technol Adv Mater. 2020;21(1):278–302. doi:10.1080/14686996.2020.1752115.
  • Zhan Y, Grottenmüller R, Li W, et al. Evaluation of mechanical properties and hydrophobicity of room-temperature, moisture-curable polysilazane coatings. J Appl Polym Sci. 2021;138(21):50469. doi:10.1002/APP.50469.
  • Ohishi T, Yamazaki Y. Formation and gas barrier characteristics of polysilazane-derived silica coatings formed by excimer light irradiation on PET films with vacuum evaporated silica coatings. Mater Sci Appl. 2016;8(1):1–14. doi:10.4236/MSA.2017.81001.
  • Niizeki T, Nagayama S, Hasegawa Y, et al. Structural study of silica coating thin layers prepared from perhydropolysilazane: substrate dependence and water penetration structure. Coatings. 2016;6(4):64. doi:10.3390/COATINGS6040064.
  • Kubo T, Kozuka H. Conversion of perhydropolysilazane-to-silica thin films by exposure to vapor from aqueous ammonia at room temperature. J Ceram Soc Jpn. 2006;114(1330):517–523. doi:10.2109/jcersj.114.517.
  • Lee JS, Oh JH, Moon SW, et al. A technique for converting perhydropolysilazane to SiOx at low temperature. Electrochem Solid State Lett. 2010;13(1):II23–II25. doi:10.1149/1.3264092.
  • Morlier A, Cros S, Garandet JP, et al. Thin gas-barrier silica layers from perhydropolysilazane obtained through low temperature curings: a comparative study. Thin Solid Films. 2012;524:62–66. doi:10.1016/J.TSF.2012.09.065.
  • Morlier A, Cros S, Garandet JP, et al. Structural properties of ultraviolet cured polysilazane gas barrier layers on polymer substrates. Thin Solid Films. 2014;550:85–89. doi:10.1016/J.TSF.2013.10.140.
  • Funayama O, Tashiro Y, Kamo A, et al. Conversion mechanism of perhydropolysilazane into silicon nitride-based ceramics. J Mater Sci. 1994;29(18):4883–4888. doi:10.1007/BF00356538.
  • Kozuka H, Nakajima K, Uchiyama H. Superior properties of silica thin films prepared from perhydropolysilazane solutions at room temperature in comparison with conventional alkoxide-derived silica gel films. ACS Appl Mater Interf. 2013;5(17):8329–8336. doi:10.1021/am400845y.
  • Kim S-D, Ko P-S, Park K-S. Perhydropolysilazane spin-on dielectrics for inter-layer-dielectric applications of sub-30 Nm silicon technology. Semicond Sci Technol. 2013;28(3):035008, doi:10.1088/0268-1242/28/3/035008.
  • Günthner M, Pscherer M, Kaufmann C, et al. High emissivity coatings based on polysilazanes for flexible Cu(In,Ga)Se2 thin-film solar cells. Sol Energy Mater Sol Cells. 2014;123:97–103. doi:10.1016/J.SOLMAT.2014.01.027.
  • Channa IA, Distler A, Zaiser M, et al. Thin film encapsulation of organic solar cells by direct deposition of polysilazanes from solution. Adv Energy Mater. 2019;9(26):1900598. doi:10.1002/AENM.201900598.
  • Kim J, Jang JH, Kim J-H, et al. Inorganic encapsulation method using solution-processible polysilazane for flexible solar cells. ACS Appl Energy Mater. 2020;3(9):9257–9263. doi:10.1021/ACSAEM.0C01593.
  • Wang D, Ma J, Li P, et al. Flexible hard coatings with self-evolution behavior in a low earth orbit environment. ACS Appl Mater Interfaces. 2021;13(38):46003–46014. doi:10.1021/acsami.1c13807.
  • Rossi S, Deflorian F, Fedel M. Polysilazane-based coatings: corrosion protection and anti-graffiti properties. Surf Eng. 2018;35(4):343–350. doi:10.1080/02670844.2018.1465748.
  • Zhu J, Shen G, Jiang W, et al. The preparation and properties study of novel hydrophobic/superhdrophobic coatings based on fluorine modified perhydropolysilazane. J Dispers Sci Technol. 2021. doi:10.1080/01932691.2021.1974871.
  • Chen N, Reeja-Jayan B, Liu A, et al. ICVD cyclic polysiloxane and polysilazane as nanoscale thin-film electrolyte: synthesis and properties. Macromol Rapid Commun. 2016;37(5):446–452. doi:10.1002/MARC.201500649.
  • Shokri B, Firouzjah MA, Hosseini SI. FTIR analysis of silicon dioxide thin film deposited by metal organic-based PECVD. In Proceedings of 19th international symposium on plasma chemistry society; Bochum, Germany; 2009. p. 26–31.
  • Derrick MR, Stulik D, Landry JM. Infrared spectroscopy in conservation science. Los Angeles (CA): The Getty Conservation Institute; 1999.
  • Shi Y, He L, Guang F, et al. A review: preparation, performance, and applications of silicon oxynitride film. Micromachines (Basel). 2019;10(8):552, doi:10.3390/mi10080552.
  • Major GH, Fairley N, Sherwood PMA, et al. Practical guide for curve fitting in X-ray photoelectron spectroscopy. J VacSci Technol A: Vac, Surf Films. 2020;38(6):061203, doi:10.1116/6.0000377.
  • Akkaya A, Boyarbay B, Etin HC, et al. A study on the electronic properties of SiO x N y /p-Si interface. Silicon. 2018;10:2717–2725. doi:10.1007/s12633-018-9811-6.
  • Moulder JF, Stickle WF, Sobol PE, et al. Handbook of X-Ray photoelectron spectroscopy. In: Chastain J, editor. Perkin-Elmer corporation. Eden Prairie: Physical Electronics Division; 1992.
  • NIST X-ray Photoelectron Spectroscopy (XPS) Database, Version 3.5. [cited 2022 Sep 19]. Available from: https://srdata.nist.gov/xps/Default.aspx.

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.