Generation of Charged Nanoparticles During the Synthesis of GaN Nanostructures by Atmospheric-Pressure Chemical Vapor Deposition

REFERENCES

• Adachi , M. , Okuyama , K. , Tohge , N. , Shimada , M. , Satoh , J. and Muroyama , M. 1992 . Gas-Phase Nucleation in an Atmospheric Pressure Chemical Vapor Deposition Process for SiO2 Films Using Tetraethylorthosilicate (TEOS) . Jap. J. Appl. Phys. , 31 : L1439 – L1422 .
   Web of Science ®Google Scholar
• Adachi , M. , Okuyama , K. , Tohge , N. , Shimada , M. , Satoh , J. and Muroyama , M. 1993 . Particle Generation and Film Formation in an Atmospheric-Pressure Chemical Vapor Deposition Reactor Using the Tetraethylorthosilicate (TEOS)/He, TEOS/O2/He, and TEOS/O3/He Systems . Jap. J. Appl. Phys. , 32 : L748 – L751 .
   Web of Science ®Google Scholar
• Adachi , M. , Okuyama , K. and Tohge , N. 1995 . Particle Generation and Film Formation in an Atmospheric-Pressure Chemical Vapour Deposition Process Using Tetraethylorthosilicate . J. Mater. Sci. , 30 : 932 – 937 .
   Web of Science ®Google Scholar
• Adachi , M. , Okuyama , K. , Fujimoto , T. , Satoh , J. and Muroyama , M. 1996 . Morphology Control of Films Formed by Atmospheric-Pressure Chemical Vapor Deposition Using Tetraethylorthosilicate/Ozone System . Jap. J. Appl. Phys. , 35 : 4438 – 4443 .
   Web of Science ®Google Scholar
• Ahn , H. S. , Park , H. M. , Kim , D. Y. and Hwang , N. M. 2002 . Observation of Carbon Clusters of a Few Nanometers in the Oxyacetylene Diamond CVD Process . J. Cryst. Growth , 234 : 399 – 403 .
   Web of Science ®Google Scholar
• Amano , H. , Sawaki , N. , Akasaki , I. and Toyoda , Y. 1986 . Metalorganic Vapor Phase Epitaxial Growth of a High Quality GaN Film Using an AlN Buffer Layer . Appl. Phys. Lett. , 48 : 353 – 355 .
   Web of Science ®Google Scholar
• Ambacher , O. 1998 . Growth and Applications of Group III-Nitrides . J. Phys. D: Appl. Phys. , 31 : 2653 – 2710 .
   Web of Science ®Google Scholar
• Banholzer , W. 1992 . Understanding the Mechanism of CVD Diamond . Surf. Coat. Technol. , 53 : 1 – 12 .
   Web of Science ®Google Scholar
• Brown , I. 1995 . Handbook of Ion Sources , New York : CRC Press .
   Google Scholar
• Cai , X. M. , Djurisic , A. B. and Xie , M. H. 2006 . GaN Nanowires: CVD Synthesis and Properties . Thin Solid Films , 515 : 984 – 989 .
   Web of Science ®Google Scholar
• Campbell , W. B. 1970 . Growth of Whiskers by Vapor-Phase Reactions , New York, London, Sydney, Toronto : Wiley-Interscience .
   Google Scholar
• Cheong , W. S. , Hwang , N. M. and Yoon , D. Y. 1999 . Observation of Nanometer Silicon Clusters in the Hot-Filament CVD Process . J. Cryst. Growth , 204 : 52 – 61 .
   Web of Science ®Google Scholar
• Choi , S. W. , Bachmann , K. J. and Lucovsky , G. 1993 . Growth Kinetics and Characterizations of Gallium Nitride Thin Films by Remote PECVD . J. Mater. Res. , 8 : 847 – 854 .
   Web of Science ®Google Scholar
• Cvelbar , U. 2011 . Towards Large-Scale Plasma-Assisted Synthesis of Nanowires . J. Phys. D: Appl. Phys. , 44 : 174014
   Web of Science ®Google Scholar
• Di Lello , B. C. , Moura , F. J. and Solózano , I. G. 2002 . Synthesis and Characterization of GaN Using Gas-Solid Reactions . Mater. Sci. Eng. B , 93 : 219 – 223 .
   Web of Science ®Google Scholar
• Djurišić , A. B. , Cai , X. M. and Xie , M. H. 2008 . III-Nitride Nanomaterials: Growth and Properties , London : Imperial College Press .
   Google Scholar
• Grzegory , I. , Jun , J. , Bockowski , M. , Krukowski , S. T. , Wróblewski , M. Lucznik , B. 1995 . III-V Nitrides-Thermodynamics and Crystal Growth at High N2 Pressure . J. Phys. Chem. Solids , 56 : 639 – 647 .
   Web of Science ®Google Scholar
• Han , W. , Fan , S. , Li , Q. and Hu , Y. 1997 . Synthesis of Gallium Nitride Nanorods through a Carbon Nanotube-Confined Reaction . Science , 277 : 1287 – 1289 .
   Web of Science ®Google Scholar
• Hahn , J. H. , Hwang , N. M. and Yoon , D. Y. 1996 . Formation of Soot or Diamond on the Iron Substrate in the Chemical Vapour Deposition Process of Diamond . J. Mater. Sci. Lett. , 15 : 1240 – 1242 .
   Google Scholar
• Hirth , J. P. and Pound , G. M. 1963 . Condensation and Evaporation , Oxford : Pergamon Press .
   Google Scholar
• Hudgins , J. L. , Simin , G. S. , Santi , E. and Khan , M. A. 2003 . An Assessment of Wide Bandgap Semiconductors for Power Devices . IEEE Trans. Power Electron. , 18 : 907 – 914 .
   Web of Science ®Google Scholar
• Hwang , N. M. and Yoon , D. Y. 1994 . Thermodynamic Approach to the Chemical Vapor Deposition Process . J. Cryst. Growth , 143 : 103 – 109 .
   Web of Science ®Google Scholar
• Hwang , N. M. , Hahn , J. H. and Yoon , D. Y. 1996 . Charged Cluster Model in the Low Pressure Synthesis of Diamond . J. Cryst. Growth , 162 : 55 – 68 .
   Web of Science ®Google Scholar
• Hwang , N. M. and Yoon , D. Y. 1996 . Thermodynamic Approach to the Paradox of Diamond Formation with Simultaneous Graphite Etching in the Low Pressure Synthesis of Diamond . J. Cryst. Growth , 160 : 98 – 103 .
   Web of Science ®Google Scholar
• Hwang , N. M. 1999 . Evidence of Nanometer-Sized Charged Carbon Clusters in the Gas Phase of the Diamond Chemical Vapor Deposition (CVD) Process . J. Cryst. Growth , 204 : 85 – 90 .
   Web of Science ®Google Scholar
• Hwang , N. M. and Kim , D. Y. 2004 . Charged Clusters in Thin Film Growth . Int. Mater. Rev. , 49 : 171 – 190 .
   Web of Science ®Google Scholar
• Hwang , N. M. and Lee , D. K. 2010 . Charged Nanoparticles in Thin Film and Nanostructure Growth by Chemical Vapour Deposition . J. Phys. D: Appl. Phys. , 43 : 483001
   Web of Science ®Google Scholar
• Intra , P. and Tippayawong , N. 2008 . An Overview of Differential Mobility Analyzers for Size Classification of Nanometer-Sized Aerosol Particles . Songklanakarin J. Sci. Technol. , 30 : 243 – 256 .
   Google Scholar
• Jeon , J. D. , Park , C. J. , Kim , D. Y. and Hwang , N. M. 2000 . Experimental Confirmation of Charged Carbon Clusters in the Hot Filament Diamond Reactor . J. Cryst. Growth , 213 : 79 – 82 .
   Web of Science ®Google Scholar
• Jeon , I. D. , Gueroudji , L. , Kim , D. Y. and Hwang , N. M. 2001a . Temperature Dependence of the Deposition Behavior of Yttria-Stabilized Zirconia CVD Films: Approach by Charged Cluster Model . J. Korean Ceram. Soc. , 38 : 218 – 224 .
   Google Scholar
• Jeon , I. D. , Park , C. J. , Kim , D. Y. and Hwang , N. M. 2001b . Effect of Methane Concentration on Size of Charged Clusters in the Hot Filament Diamond CVD Process . J. Cryst. Growth , 223 : 6 – 14 .
   Web of Science ®Google Scholar
• Kim , C. S. , Chung , Y. B. , Youn , W. K. and Hwang , N. M. 2009a . Generation of Charged Nanoparticles during Synthesis of ZnO Nanowires by Carbothermal Reduction . Aerosol Sci. Technol. , 43 : 120 – 125 .
   Web of Science ®Google Scholar
• Kim , C. S. , Chung , Y. B. , Youn , W. K. and Hwang , N. M. 2009b . Generation of Charged Nanoparticles during the Synthesis of Carbon Nanotubes by Chemical Vapor Deposition . Carbon , 47 : 2511 – 2518 .
   Web of Science ®Google Scholar
• Kim , C. S. , Youn , W. K. and Hwang , N. M. 2010b . Generation of Charged Nanoparticles and Their Deposition during the Synthesis of Silicon Thin Films by Chemical Vapor Deposition . J. Appl. Phys. , 108 : 014313
   Web of Science ®Google Scholar
• Kim , C. S. , Kwak , I. J. , Choi , K. J. , Park , J. G. and Hwang , N. M. 2010a . Generation of Charged Nanoparticles during the Synthesis of Silicon Nanowires by Chemical Vapor Deposition . J. Phys. Chem. C , 114 : 3390 – 3395 .
   Web of Science ®Google Scholar
• Kim , J. Y. , Kim , D. Y. and Hwang , N. M. 2006 . Spontaneous Generation of Negatively Charged Clusters and Their Deposition as Crystalline Films during Hot-Wire Silicon Chemical Vapor Deposition . Pure Appl. Chem. , 78 : 1715 – 1722 .
   Web of Science ®Google Scholar
• Knutson , E. O. and Whitby , K. T. 1975a . Aerosol Classification by Electric Mobility: Apparatus, Theory, and Applications . J. Aerosol Sci. , 6 : 443 – 451 .
   Google Scholar
• Knutson , E. O. and Whitby , K. T. 1975b . Accurate Measurement of Aerosol Electric Mobility Moments . J. Aerosol Sci. , 6 : 453 – 460 .
   Google Scholar
• Langmuir , I. and Kingdon , K. H. 1925 . Thermionic Effects Caused by Vapours of Alkali Metals . Proc. R. Soc. London, Ser. A , 107 : 61 – 79 .
   Google Scholar
• Lee , B. S. , Barnes , M. C. , Kim , D. Y. and Hwang , N. M. 2002a . Spontaneous Generation of Charged Clusters of a Few Nanometers during Thermal Evaporation of Copper . J. Cryst. Growth , 234 : 599 – 602 .
   Web of Science ®Google Scholar
• Lee , J. I. and Hwang , N. M. 2008 . Generation of Negative-Charge Carriers in the Gas Phase and Their Contribution to the Growth of Carbon Nanotubes during Hot-Filament Chemical Vapor Deposition . Carbon , 46 : 1588 – 1592 .
   Web of Science ®Google Scholar
• Lee , S. C. , Hwang , N. M. , Yu , B. D. and Kim , D. Y. 2001 . Molecular Dynamics Simulation on the Deposition Behavior of Nanometer-Sized Au Clusters on a Au (001) Surface . J. Cryst. Growth , 223 : 311 – 320 .
   Web of Science ®Google Scholar
• Lee , S. C. , Yu , B. D. , Kim , D. Y. and Hwang , N. M. 2002b . Effects of Cluster Size and Substrate Temperature on the Homoepitaxial Deposition of Au Clusters . J. Cryst. Growth , 242 : 463 – 470 .
   Web of Science ®Google Scholar
• Lee , S. S. , Ko , M. S. , Kim , C. S. and Hwang , N. M. 2008 . Gas Phase Nucleation of Crystalline Silicon and Their Role in Low-Temperature Deposition of Microcrystalline Films during Hot-Wire Chemical Vapor Deposition . J. Cryst. Growth , 310 : 3659 – 3662 .
   Web of Science ®Google Scholar
• Li , H. D. , Yang , H. B. , Yu , S. , Zou , G. T. , Li , Y. D. Liu , S. Y. 1996 . Synthesis of Ultrafine Gallium Nitride Powder by the Direct Current Arc Plasma Method . Appl. Phys. Lett. , 69 : 1285 – 1287 .
   Web of Science ®Google Scholar
• Lindmayer , J. 1965 . Heterojunction Properties of the Oxidised Semiconductor . Solid State Electron. , 8 : 523 – 528 .
   Web of Science ®Google Scholar
• Liu , B. , Bando , Y. , Tang , C. , Shen , G. , Golberg , D. and Xu , F. 2006 . Wurtzite-Type Faceted Single-Crystalline GaN Nanotubes . Appl. Phys. Lett. , 88 : 093120 – 093123 .
   Web of Science ®Google Scholar
• Mishra , U. K. , Parikh , P. and Yi-Feng , W. 2002 . AlGaN/GaN HEMTs—an Overview of Device Operation and Applications . Proc. IEEE , 90 : 1022 – 1031 .
   Web of Science ®Google Scholar
• Neudeck , P. G. , Okojie , R. S. and Liang-Yu , C. 2002 . High-Temperature Electronics—a Role for Wide Bandgap Semiconductors? . Proc. IEEE , 90 : 1065 – 1076 .
   Web of Science ®Google Scholar
• Nunomura , S. , Koga , K. , Shiratani , M. , Watanabe , Y. , Morisada , Y. Matsuki , N. 2005 . Fabrication of Nanoparticle Composite Porous Films Having Ultralow Dielectric Constant . Jap. J. Appl. Phys. , 44 : L1509 – L1511 .
   Web of Science ®Google Scholar
• Orton , J. W. and Foxon , C. T. 1998 . Group III Nitride Semiconductors for Short Wavelength Light-Emitting Devices . Rep. Prog. Phys. , 61 : 1 – 75 .
   Web of Science ®Google Scholar
• Ostrikov , K. 2005 . Colloquium: Reactive Plasmas as a Versatile Nanofabrication Tool . Rev. Mod. Phys. , 77 : 489 – 510 .
   Web of Science ®Google Scholar
• Ostrikov , K. and Murphy , A. B. 2007 . Plasma-Aided Nanofabrication: Where is the Cutting Edge? . J. Phys. D: Appl. Phys. , 40 : 2223 – 2241 .
   Web of Science ®Google Scholar
• Ostrikov , K. , Levchenko , I. , Cvelbar , U. , Sunkara , M. and Mozetic , M. 2010 . From Nucleation to Nanowires: A Single-Step Process in Reactive Plasmas . Nanoscale , 2 : 2012 – 2027 .
   PubMed Web of Science ®Google Scholar
• Pagonis , V. , Ankjærgaard , C. , Murray , A. S. and Chen , R. 2009 . Optically Stimulated Exoelectron Emission Processes in Quartz: Comparison of Experiment and Theory . J. Lumin. , 129 : 1003 – 1009 .
   Web of Science ®Google Scholar
• Peng , H. Y. , Zhou , X. T. , Wang , N. , Zheng , Y. F. , Liao , L. S. , Shi , W. S. , Lee , C. S. and Lee , S. T. 2000 . Bulk-Quantity GaN Nanowires Synthesized from Hot Filament Chemical Vapor Deposition . Chem. Phys. Lett. , 327 : 263 – 270 .
   Web of Science ®Google Scholar
• Piekarczyk , W. 1998 . How and Why CVD Diamond is Formed: A Solution of the Thermodynamic Paradox . J. Mater. Sci. , 33 : 3443 – 3453 .
   Web of Science ®Google Scholar
• Roca i Cabarrocas , P. 2000 . Plasma Enhanced Chemical Vapor Deposition of Amorphous, Polymorphous and Microcrystalline Silicon Films . J. Non-Cryst. Solids , 266–269 : 31 – 37 .
   Web of Science ®Google Scholar
• Roca i Cabarrocas , P. 2002 . Plasma Enhanced Chemical Vapor Deposition of Silicon Thin Films for Large Area Electronics . Curr. Opin. Solid State Mater. Sci. , 6 : 439 – 444 .
   Web of Science ®Google Scholar
• Sears , G. W. 1955 . A Mechanism of Whisker Growth . Acta Metall. , 3 : 367 – 369 .
   Google Scholar
• Seidl , M. , Meiwes-Broer , K. H. and Brack , M. 1991 . Finite-Size Effects in Ionization Potentials and Electron Affinities of Metal Clusters . J. Chem. Phys. , 95 : 1295 – 1303 .
   Web of Science ®Google Scholar
• Shimada , M. , Iskandar , F. and Okuyama , K. 2000 . Development of DMA-Faraday Cup Electrometer System for Measurement of Submicron Aerosol Particles . AIP Conf. Proc. , 534 : 773 – 776 .
   Google Scholar
• Shimada , M. , Lee , H. M. , Kim , C. S. , Koyama , H. , Myojo , T. and Okuyama , K. 2005 . Development of an LDMA-FCE System for the Measurement of Submicron Aerosol Particles . J. Chem. Eng. Jpn. , 38 : 34 – 44 .
   Web of Science ®Google Scholar
• Takamura , Y. , Hayasaki , K. , Terashima , K. and Yoshida , T. 1997 . Cluster Size Measurement Using Microtrench in a Thermal Plasma Flash Evaporation Process . J. Vac. Sci. Technol., B , 15 : 558 – 565 .
   Google Scholar
• Tang , C. , Bando , Y. and Liu , Z. 2003 . Thermal Oxidation of Gallium Nitride Nanowires . Appl. Phys. Lett. , 83 : 3177 – 3179 .
   Web of Science ®Google Scholar
• Tsai , M. H. , Sankey , O. F. , Schmidt , K. E. and Tsong , I. S. T. 2002 . Electronic Structures of Polar and Nonpolar GaN Surfaces . Mater. Sci. Eng. B , 88 : 40 – 46 .
   Web of Science ®Google Scholar
• Vladimirov , S. V. and Ostrikov , K. 2004 . Dynamic Self-Organization Phenomena in Complex Ionized Gas Systems: New Paradigms and Technological Aspects . Phys. Rep. , 393 : 175 – 380 .
   Web of Science ®Google Scholar
• Wolter , S. D. , Mohney , S. E. , Venugopalan , H. , Wickenden , A. E. and Koleske , D. D. 1998 . Kinetic Study of the Oxidation of Gallium Nitride in Dry Air . J. Electrochem. Soc. , 145 : 629 – 632 .
   Web of Science ®Google Scholar
• Xia , Y. , Yang , P. , Sun , Y. , Wu , Y. , Mayers , B. Gates , B. 2003 . One-Dimensional Nanostructures: Synthesis, Characterization, and Applications . Adv. Mater. , 15 : 353 – 389 .
   Web of Science ®Google Scholar
• Xu , Z. and Zhanhua , S. L. 2009 . The Influence of Saffman Lift Force on Nanoparticle Concentration Distribution Near a Wall . Appl. Phys. Lett. , 95 : 124105
   Web of Science ®Google Scholar
• Yarbrough , W. A. 1992 . Vapor-Phase-Deposited Diamond—Problems and Potential . J. Am. Ceram. Soc. , 75 : 3179 – 3200 .
   Web of Science ®Google Scholar
• Yasui , K. , Morimoto , K. and Akahane , T. 2003 . Growth of GaN Films on NitridedGaAs Substrates Using Hot-Wire CVD . Thin Solid Films , 430 : 174 – 177 .
   Web of Science ®Google Scholar
• Zhou , X. T. , Sham , T. K. , Shan , Y. Y. , Duan , X. F. , Lee , S. T. and Rosenberg , R. A. 2005 . One-Dimensional Zigzag Gallium Nitride Nanostructures . J. Appl. Phys. , 97 : 1 – 6 .
   Web of Science ®Google Scholar