82
Views
4
CrossRef citations to date
0
Altmetric
Original Articles

Teaching and learning in microsystems engineering

&
Pages 341-352 | Received 26 Oct 2004, Published online: 20 Aug 2006

References

  • Ahn , C. H. , Kim , Y. J. and Allen , M. G. A planar variable reluctance magnetic micromotor with fully integrated stator and wrapped coils . Proc. IEEE MEMS , pp. 1 – 6 .
  • Doty , F. D. 1991 . High efficiency microturbine technology . Proc. 26th Ener. Conver. Eng. Conf. , 2 : 436 – 442 .
  • Fan , L. S. 1988 . IC processed electrostatic micromotors . IEEE Int. Electron. Devices Meet. , : 666 – 669 .
  • Fan , L. S. , Tai , Y. C. and Muller , R. S. 1989 . IC-processed electrostatic motors . Sens. Actuat. , 20 : 41 – 47 .
  • Field , L. A. , White , R. M. and Pisano , A. P. Fluid powered rotary gears and microflow channels . 6th Int. Conf. Solid State Sens. Actuat. , pp. 1033 – 1037 . IEEE Electron Devices Society .
  • Flockhart , S. M. and Dhariwal , R. S. 1998 . Reduction of friction in a fluid driven micro-actuator using a stepped bearing plate . J. Micromech. Microengin. , 8 : 151 – 154 .
  • Fujita , H. 1996 . Future of Actuators and Microsystems . Sens. Actuat. A , 56 : 105 – 111 .
  • Graveson , P. , Branebjerg , J. and Jensen , O. S. 1993 . Microfluidics—a review . J. Micromech. Microengin. , 3 : 168 – 182 .
  • Huang , J. B. , Tong , Q. Y. and Mao , P. S. 1992 . Gas lubricated microbearings for microactuators . Sens. Actuat. A , 35 : 69 – 75 .
  • Kladitis , P. E. Solder self assembled micro axial flow fan driven by a scratch drive actuator rotary motor . 14th IEEE Int. Conf. MEMS , pp. 598 – 601 .
  • Kumar , S. and Cho , D. 1991 . A proposal for electrically levitating micromotors . Sens. Actuat. A , : 141 – 149 .
  • Mehregany , M. , Bart , S. F. , Tavrow , L. S. , Lang , J. H. and Senturia , S. D. 1990 . Principles in design and microfabrication of variable-capacitance side drive motors . J. Vac. Sci. Technol. A , 8 : 3614 – 3624 .
  • Shoji , S. and Esahi , M. 1994 . Microflow devices and systems . J. Micromech. Microengin. , 4 : 157 – 171 .
  • Tai , Y. C. and Muller , R. S. 1989 . IC-processed electrostatic synchronous micromotor . Sens. and Actuat. , 20 : 49 – 55 .

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.