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Letters to the Editor

Growth of Insulating Oxide Film on Gallium Antimonide by Thermal Oxidation and its Characterisation

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Pages 181-183 | Published online: 02 Jun 2015

REFERENCES

  • C W Wilmsen, Chemical Composition and Formation of Thermal and Anodic Oxide/III-V compound Semiconductor Intr- faces. J Vac Sci Technol, vol 19, pp 279–289, Sept-Oct 1981.
  • G P Schwartz, Analysis of Native Oxide Films and Oxide Substrate Reactions on III-V Semiconductors using Thermochemical phase Diagrams, Thin Solid Film, vol 103, pp 3–16, 1983.
  • N Kitamura, T Kikuchi, M Kakehi & T Wada, Chemical Depth Profile of Thermal Oxide on GaSb using XPS Methods, Jpn J Appl Phys, vol 23, pp 1534–1535, 1984.
  • H Hasegawa & T Sawada, On the Electrical Properties of Compound Semiconductor Interfaces in Metal/Insulator/Semiconductor structures and the possible origin of interface states, Thin Solid Films, vol 103, pp 119–139, 1983.
  • R P H Chang, T T Shcng, C C Chang & J J Coleman, Physical and Electrical Properties of Plasma grown Oxide on Ga0·64Al As0·16, Appl Phys Lett, vol 33, pp 341–342, 1978.
  • E H Nicollian & Brews, MOS (Metal Oxide Semiconductor) Physics and Technology, Wiley New York, 1982.

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