REFERENCES
- Anonymous . 1997 . Microelectromechanical Systems: Advanced Materials and Fabrication Methods , Washington, D.C. : National Academy Press . NMAB-483
- Roukes , M. 2001 . Nanoelectromechanical Systems Face the Future . Phys. World , February : pp. 25 – 31 .
- Komvopoulos , K. 2003 . Adhesion and Friction Force in Microelectromechanical Systems: Mechanisms, Measurement, Surface Modification Techniques, and Adhesion Theory . J. Adhesion Sci. Technol. , 17 ( 4 ) : pp. 477 – 517 .
- Merlijn , W. , Spengen , V. , Puers , R. and Wolf , I. D. 2003 . On the Physics of Stiction and Its Impact on the Reliability of Microstructures . J. Adhesion Sci. Technol. , 17 ( 4 ) : pp. 563 – 582 .
- Bhushan , B. 2003 . Adhesion and Stiction: Mechanisms, Measurement Techniques, and Methods for Reduction . J. Vac. Sci. Technol. , B 21 ( 1 ) : pp. 2262 – 2296 .
- Maboudian , R. and Carraro , C. 2003 . Surface Engineering for Reliable Operation of MEMS Devices . J. Vac. Sci. Technol. , B 21 ( 1 ) : pp. 2262 – 2296 .
- Maboudian , R. and Carraro , C. 2004 . Surface Chemistry and Tribology of MEMS . Annu. Rev. Phys. Chem. , 55 : pp. 35 – 54 .
- Zhao , Y. 2003 . Stiction and Anti-Stiction in MEMS and NEMS . Acta Mechanica Sinica/Lixue Xuebao , 19 ( 1 ) : pp. 1 – 10 .
- Zhao , Y. , Wang , L. S. and Yu , T. X. 2003 . Stiction and Anti-Stiction in MEMS and NEMS . J. Adhesion Sci. Technol. , 17 ( 4 ) : pp. 519 – 546 .
- Maboudian , R. and Howe , R. T. 1997 . Critical Review: Adhesion in Surface Micromechanical Structures . J. Vac. Sci. Technol. , B 15 ( 1 ) : pp. 1 – 20 .
- Ando , Y. and Ino , J. 1996 . Friction and Pull-off Force on Silicon Surface Modified by FIB . Sens. Actuators A , 57 : pp. 83 – 89 .
- Ando , Y. 2000 . The Effect of Relative Humidity on Friction and Pull-off Forces Measured on Submicron-Size Asperity Arrays . Wear , 238 : pp. 12 – 19 .
- Peters , K. F. , Cohen , J. B. and Chung , Y.-W. 1998 . Melting of Pb Nanocrystals . Phys. Rev. B , 57 : pp. 13430 – 13438 .
- Schmidt , M. , Kusche , R. Kronmüller , W. 1997 . Experimental Determination of the Melting Point and Heat Capacity for a Free Cluster of 139 Sodium Atoms . Phys. Rev. Lett. , 79 : pp. 99 – 103 .
- Unruh , K. M. , Huber , T. E. and Huber , C. A. 1993 . Melting and Freezing Behavior of Indium Metal in Porous Glasses . Phys. Rev. B , 48 : pp 90219027
- Yoon , E. , Yang , S. H. , Han , H. and Kong , H. 2003 . An Experimental Study on the Adhesion at a Nano-Contact . Wear , 254 : pp. 974 – 980 .
- Suzuki , S. , Matsuura , T. Uchizawa , M. 1991 . Friction and Wear Studies on Lubricants and Materials Applicable to MEMS . Proc. of the IEEE Micro Electro Mechanical System . 1991 , Nara, Japan. Vol. 17, 4 , pp. pp. 143 – 147 .
- Bowden , F. P. and Tabor , D. 1950 . Friction and Lubrication of Solids, Part I , Oxford, , U.K. : Clarendon Press .
- Suh , N. P. and Sin , H.-C. 1981 . The Genesis of Friction . Wear , 69 : pp. 91 – 114 .
- Komvopoulos , K. , Saka , N. and Suh , N. P. 1985 . The Mechanism of Friction in Boundary Lubrication . ASME Journal of Tribology , 107 : pp. 452 – 462 .
- Komvopoulos , K. , Saka , N. and Suh , N. P. 1986 . Plowing Friction in Dry and Lubricated Metal Sliding . ASME Journal of Tribology , 108 : pp. 301 – 313 .