A multivariate double EWMA process adjustment scheme for drifting processes

References

• Adivikolanu , S. and Zafiriou , E. ( 2000 ) Extensions and performance robustness tradeoffs of the EWMA run-to-run controller by suing the internal model control structure. IEEE Transactions on Electronics Packaging Manufacturing , 23 ( 1 ), 56 – 68 .
   Web of Science ®Google Scholar
• Amstrom , K.J. and Wittenmark , B. ( 1997 ) Computer Controlled Systems. Theory and Design , 3rd ed., Prentice Hall, NJ .
   Google Scholar
• Box , G.E.P. and Jenkins , G.M. ( 1976 ) Time Series Analysis, Forecasting and Control , Holden Day, Oakland , CA .
   Google Scholar
• Box , G.E.P. and Lucefio , A. ( 1997 ) Statistical Control by Monitoring and Feedback Adjustment , John Wiley & Sons, New York , NY .
   Google Scholar
• Butler , S.W. and Stefani , J.A. ( 1994 ) Supervisory run-to-run control of a polysilicon gate etch using in situ ellipsometry. IEEE Transactions on Semiconductor Manufacturing , 7 . 193 – 201 .
   Web of Science ®Google Scholar
• Chen , A. and Guo , R.S. ( 2001 ) Age-based double EWMA controller and its application to a CMP process, in Run-to-Run Control in Semiconductor Manufacturing , Moyne , J. , Del Castillo , E. and Hurwitz , A. (eds.), CRC Press, Boca Raton , FL , pp. 261 – 278 .
   Google Scholar
• Del Castillo , E. ( 1999 ) Long run and transient analysis of a double EWMA feedback controller. IIE Transactions , 31 , 1 – 13 .
   Google Scholar
• Del Castillo , E. ( 2001 ) Some properties of EWMA feedback quality adjustment schemes for drifting disturbances. Journal of Quality Technology , 33 ( 2 ), 153 – 166 .
   Web of Science ®Google Scholar
• Del Castillo , E. and Hurwitz . A.M. ( 1997 ) Run-to-run process control: literature review and extensions. Journal of Quality Technology , 29 , 184 – 196 .
   Web of Science ®Google Scholar
• Ingolfsson , A. and Sachs , E. ( 1993 ) Stability and sensitivity of an EWMA controller. Journal of Quality Technology , 25 ( 4 ), pp. 271 – 287 .
   Web of Science ®Google Scholar
• Lowry , C.A. , Woodall , W.H. , Champ , C.W. and Rigdon , S.E. ( 1992 ) A multivariate exponentially weighted moving average control chart. Technometrics , 34 , 46 – 53 .
   Web of Science ®Google Scholar
• Myers , R.H. and Montgomery , D.C. ( 1995 ) Response Surface Methodology , John Wiley and Sons, New York , NY .
   Google Scholar
• Prabhu , S.S. and Runger , G.C. ( 1997 ). Designing a multivariate EWMA control chart. Journal of Quality Technology. , 29 , 8 – 15 .
   Web of Science ®Google Scholar
• Rajagopal , R. ( 2000 ) Analysis and multivariate extensions of double EWMA feedback adjustment scheme for quality control. Master Thesis, Department of Industrial and Manufacturing Engineering , Penn State University, University Park , PA 16802 .
   Google Scholar
• Rajagopal , R. and Del Castillo , E. ( 2001 ) An analysis and MIMO extension of a double EWMA run-to-run controlle. Working paper , IME department, Penn State University, University Park , PA 16802 .
   Google Scholar
• Reinsel , G.C. ( 1997 ) Elements of Multivariate Time Series Analysis , 2nd edn., Springer, New York , NY .
   Google Scholar
• Sachs , E. , Hu , A. and Ingolfsson , A. ( 1995 ) Run by run process control: combining SPC and feedback control. IEEE Transactions on Semiconductor Manufacturing , 8 , 26 – 43 .
   Web of Science ®Google Scholar
• Tseng , S.T. , Chou , I.U. and Lee , S.P. ( 2000 ) A study of a multivariate EWMA controller. Working paper, Institute of Statistics , National Tsing Hua University, HsinChu , Taiwan 30043 , ROC.
   Google Scholar
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   Google Scholar