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ORIGINAL ARTICLES

Quasi-minimum mean square error run-to-run controller for dynamic models

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Pages 185-196 | Received 01 Oct 2012, Accepted 01 Mar 2013, Published online: 06 Nov 2013

References

  • Box , G. E.P. , Jenkins , G. M. and Reinsel , G. C. 1994 . Time Series Analysis: Forecasting and Control , Englewood Cliffs , N.J. : Prentice Hall .
  • Box , G. E.P. and MacGregor , J. F. 1974 . The analysis of closed-loop dynamic-stochastic systems . Technometrics , 16 : 391 – 398 .
  • Butler , S. W. and Stefani , J. A. 1994 . Supervisory run-to-run control of polysilicon gate etch using in situ ellipsometry . IEEE Transactions on Semiconductor Manufacturing , 7 : 193 – 201 .
  • Capilla , C. , Ferrer , A. , Romero , R. and Hualda , A. 1999 . Integration of statistical and engineering process control in a continuous polymerization process . Technometrics , 41 : 14 – 28 .
  • Chen , A. and Guo , R. S. 2001 . Age-based double EWMA controller and its application to CMP processes . IEEE Transactions on Semiconductor Manufacturing , 14 : 11 – 19 .
  • Del Castillo , E. 2001 . Some properties of EWMA feedback quality adjustment schemes for drifting disturbances . Journal of Quality Technology , 33 : 153 – 166 .
  • Del Castillo , E. 2002 . Statistical Process Adjustment for Quality Control , John Wiley & Sons Inc., New York, NY .
  • Del Castillo , E. and Hurwitz , A. M. 1997 . Run-to-run process control: literature review and extensions . Journal of Quality Technology , 29 : 184 – 196 .
  • Fan , S. K.S. , Jiang , B. C. , Jen , C. H. and Wang , C. C. 2002 . SISO run-to-run feedback controller using triple EWMA smoothing for semiconductor manufacturing processes . International Journal of Production Research , 40 : 3093 – 3120 .
  • Hamby , E. S. , Kabamba , P. T. and Khargonekar , P. P. 1998 . A probabilistic approach to run-to-run control . IEEE Transactions on Semiconductor Manufacturing , 11 : 654 – 669 .
  • Horn , R. A. and Johnson , C. R. 1990 . Matrix Analysis , Cambridge University Press .
  • Ingolfsson , A. and Sachs , E. 1993 . Stability and sensitivity of an EWMA controller . Journal of Quality Technology , 25 : 271 – 287 .
  • Jen , C. H. and Jiang , B. C. 2008 . Combining on-line experiment and process control methods for changes in a dynamic model . International Journal of Production Research , 46 : 3665 – 3682 .
  • Moyne , J. , Solakhian , V. , Yershov , A. , Anderson , M. and Mockler-Hebert , D. 2002 . Development and deployment of a multi-component advanced process control system for an epitaxy tool . Proceedings of the IEEE /SEMI Advanced Semiconductor Manufacturing Conference and Workshop , : 125 – 130 .
  • Pan , R. and Del Castillo , E. 2001 . Identification and fine tuning of closed-loop processes under discrete EWMA and PI adjustments . Quality and Reliability Engineering International , 17 : 419 – 427 .
  • Sachs , E. , Hu , A. and Ingolfsson , A. 1995 . Run by run process control: combining SPC and feedback control . IEEE Transactions on Semiconductor Manufacturing , 8 : 26 – 43 .
  • Tseng , S. T. , Chou , R. J. and Lee , S. P. 2002 . Statistical design of double EWMA controller . Applied Stochastic Models in Business and Industry , 18 : 313 – 322 .
  • Tseng , S. T. and Lin , C. H. 2009 . Stability analysis of single EWMA controller under dynamic models . IIE Transactions , 41 : 654 – 663 .
  • Tseng , S. T. , Tsung , F. and Liu , P. Y. 2007 . Variable EWMA run-to-run controller for drifted processes . IIE Transactions , 39 : 291 – 301 .
  • Tseng , S. T. , Yeh , A. B. , Tsung , F. and Chan , Y. Y. 2003 . A study of variable EWMA controller . IEEE Transactions on Semiconductor Manufacturing , 16 : 633 – 643 .

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