15
Views
4
CrossRef citations to date
0
Altmetric
Original Articles

Molecular Dynamics Study of the Thin Film Formation Process

, , &
Pages 333-342 | Received 01 Jun 1990, Accepted 01 Oct 1990, Published online: 23 Sep 2006

References

  • Bauer , E. and Poppa , H. 1972 . Recent advances in epitaxy. . Thin Solid Films , 12 : 167
  • Venables , J. A. 1976 . Capabilities and limits of nucleation theories. . Thin Solid Films , 32 : 135 Nucleation calculations in a pair-binding model. Phys. Rev. B36, 4153 (1987)
  • Black , J. E. and Bopp , P. 1986 . Orientation of small rafts of xenon atoms physisorbed on P: A molecular-dynamics study. . Phys. Rev. , B34 : 7410 (111)
  • Schneider , M. , Rahman , A. and Schuller , I. K. 1985 . Role of relaxation in epitaxial growth: A molecular-dynamics study. . Phys. Rev. Lett. , 55 : 604
  • Schneider , M. , Schuller , I. K. and Rahman , A. 1987 . Epitaxial growth of silicon: A molecular-dynamics simulation. . Phys. Rev. , B36 : 1340
  • Sasajima , Y. , Nakagawa , S. , Miyamoto , E. and Imabayashi , M. 1990 . Computer simulation of relaxation process of deposited films. . J. Crystal Growth , 99 : 496
  • Ozawa , S. and Sasajima , Y. 1990 . Computer experiments of initial growth kinetics of vacuum-deposited thin films. . Vacuum , 41 : 1109
  • Grabow , M. H. and Gilmer , G. H. 1987 . Molecular dynamics studies of semiconductor thin films and interfaces. . Mater. Res. Soc. Sym. Proc. , 94 : 15

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.