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Operational planning and control of semiconductor wafer production

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Pages 639-647 | Published online: 21 Feb 2007

References

  • Allahverdi , A , Gupta , JND and Aldowaisan , T . 1999 . A review of scheduling research involving setup considerations . OMEGA , 27 : 219 – 239 .
  • Asmundsson , J , Rardin , RL and Uzsoy , R . 2006 . Tractable nonlinear production planning models for semiconductor wafer fabrication facilities . IEEE Trans. Semicon. Manuf. , 19 ( 1 ) : 95 – 111 .
  • Barr , RS , Golden , BL , Kelly , JP , Resende , MGC and Stewart , WR . 1995 . Designing and reporting computational experiments with heuristic methods . J. Heurist. , 1 ( 1 ) : 9 – 32 .
  • Cheng , TCE , Gupta , JND and Wang , G . 2000 . A review of flowshop scheduling research with setup times . Prod. Oper. Manage. , 9 : 283 – 302 .
  • Diaz , S , Fowler , JW , Pfund , ME , Mackulak , GT and Hickie , M . 2005 . Evaluating the impacts of reticle requirements in semiconductor wafer fabrication . IEEE Trans. Semicont. Manuf. , 18 ( 4 ) : 622 – 632 .
  • Fowler , JW , Hogg , GL and Phillips , DT . 2000 . Control of multiproduct bulk server diffusion/oxidation processes Part two: Multiple servers . IIE Trans. Sched. Logist. , 32 ( 2 ) : 167 – 176 .
  • Gupta , JND , Sexton , RS and Tunc , EA . 2000 . Selecting a scheduling heuristic through neural networks . INFORMS J. Comput. , 12 : 150 – 162 .
  • Gupta , JND . 2002 . An excursion in scheduling theory, Invited Paper . Prod. Plan. Cont. , 13 : 105 – 116 .
  • Gupta , JND . 1979 . “ A review of flowshop scheduling research ” . In Disaggregation Problems in Manufacturing and Service Organizations , 363 – 388 . Hingham, M : Martin Nijhoff Publishers .
  • Gupta , JND and Stafford , EF . 2006 . Flowshop Scheduling Research after Five Decades . Euro. J. Oper. Res. , 169 : 699 – 711 .
  • Horng , S-M , Fowler , JW and Cochran , J . 2000 . A genetic algorithm approach to manage ion implantation processes in wafer fabrication . Int. J. Manuf. Techno. Manag. , 1 ( 2/3 ) : 156 – 172 .
  • Hooker , JN . 1995 . Testing heuristics: we have it all wrong . J. Heuris , 1 ( 1 ) : 33 – 42 .
  • Ignizio , JP . 2004 . Optimal maintenance headcount allocation: an application of Chebyshev Goal Programming . Int. J. Prod. Res. , 42 : 201 – 210 .
  • ITRS . 2005 . International technology roadmap for semiconductors Available online at: http://public.itrs.net (accessed 4 June 2004)
  • Kumar , R , Tiwari , MK and Allada , V . 2004 . Modelling and rescheduling of a re-entrant wafer fabrication line involving machine unreliability . Int. J. Prod. Res. , 42 ( 21 ) : 4431 – 4455 .
  • Lee , CY , Uzsoy , R and Martin-Vega , LA . 1992 . Efficient algorithms for scheduling semiconductor burn-in operations . Oper. Res. , 40 ( 4 ) : 764 – 775 .
  • Mason , SJ , Fowler , JW and Carlyle , WM . 2002 . A modified shifting bottleneck heuristic for minimising the total weighted tardiness in a semiconductor wafer fab . J. Sched. , 5 ( 3 ) : 247 – 262 .
  • Mason , SJ , Jin , S and Wessels , C . 2004 . Rescheduling strategies for minimising total weighted tardiness in complex job shops . Inter. J. Prod. Res. , 42 ( 3 ) : 613 – 628 .
  • Mason , SJ , Fowler , JW , Carlyle , WM and Montgomery , DC . 2005 . Heuristics for minimising total weighted tardiness in complex job shops . Int. J. Prod. Res. , 43 ( 10 ) : 1943 – 1963 .
  • Pinedo , M . 2002 . Scheduling Theory, Algorithms and Systems , 2nd ed. , NJ : Prentice Hall .
  • Pfund , ME , Mason , SJ and Fowler , JW . 2006 . “ Semiconductor manufacturing scheduling and dispatching ” . In Handbook of Production Scheduling , Edited by: Herrmann , JW . 213 – 242 . New York : Springer .
  • Rardin , RR and Uzsoy , R . 2001 . Experimental evaluation of heuristic optimisation algorithms: A tutorial . J. Heurist. , 7 ( 2 ) : 261 – 304 .
  • Uzsoy , R , Lee , CY and Martin-Vega , LA . 1992 . A review of production planning and scheduling models in the semiconductor industry Part I: system characteristics, performance evaluation and production planning . IIE Trans. Sched. Logist. , 24 : 47 – 60 .
  • Uzsoy , R , Lee , CY and Martin-Vega , LA . 1994 . A review of production planning and scheduling models in the semiconductor industry Part II: shop control . IIE Trans. Sched. Logis. , 26 : 44 – 55 .

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