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Journal of the Chinese Institute of Industrial Engineers Volume 19, 2002 - Issue 2
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Original Articles

DEVELOPING A DATA MINING METHOD FOR WAFER BINMAP CLUSTERING AND AN EMPIRICAL STUDY IN A SEMICONDUCTOR MANUFACTURING FAB

Chen-Fu Chien Department of Industrial Engineering & Engineering Management, National Tsing Hua University, 101, Section 2, Kuang Fu Road, Hsinchu, Taiwan, 300, R.O.C.
,
Ting-Hao Lin Department of Industrial Engineering & Engineering Management, National Tsing Hua University, 101, Section 2, Kuang Fu Road, Hsinchu, Taiwan, 300, R.O.C.
,
Qiao-Wen Liu Department of Industrial Engineering & Engineering Management, National Tsing Hua University, 101, Section 2, Kuang Fu Road, Hsinchu, Taiwan, 300, R.O.C.
,
Cheng-Yung Peng Macronix International Co., Ltd.
,
Shao-Chung Hsu Macronix International Co., Ltd.
&
Chia-Chi Huang Macronix International Co., Ltd.
Pages 23-38 | Received 01 Oct 2000, Accepted 01 Oct 2001, Published online: 15 Feb 2010

  • Agresti , A. 1990 . Categorical Data Analysis New York : John Wiley .
  • Baker , M. D. , Himmel , C. D. and May , G. S. 1995 . Time series modeling of reactive ion etching using neural networks . IEEE Transactions on Semiconductor Manufacturing , 8 ( 1 ) : 62 – 71 .
  • Chen , F. L. , Liu , S. F. and Chen , C. P. 2000 . A neural-network approach to recognize defect spatial pattern in semiconductor fabrication . IEEE Transactions on Semiconductor Manufacturing , 13 ( 3 ) : 366 – 73 .
  • Chien , C. F. and Liu , Q. W. 2001 . “ Developing data mining methods for wafer bin map clustering and the empirical study in a semiconductor manufacturing fab ” . In Proceedings of the International Conference on Modern Industrial Engineering and Engineering Management in New Century 581 – 587 . Tianjin, , China 10-12 August
  • Collica , R. S. , Card , J. P. and Martin , W. 1995 . SRAM bitmap shape recognition and sorting using neural network . IEEE Transactions on Semiconductor Manufacturing , 8 ( 3 ) : 326 – 332 .
  • Friedman , D. J. , Hansen , M. H. , Nair , V. N. and James , D. A. 1997 . Model—free estimation of defect clustering in integrated circuit fabrication . IEEE Transactions on Semiconductor Manufacturing , 10 ( 3 ) : 344 – 359 .
  • Freeman , J. A. and Skapura , D. M. 1991 . Neural Networks: Algorithm and Programming Techniques Addison-Wesley .
  • Garpenter , G. A. and Grossberg , S. 1987 . ART2: self-organization of stable category recognition codes for analog input patterns . Applied Optics , 26 ( 23 ) : 4919 – 4930 .
  • Garpenter , G. A. and Grossberg , S. 1987 . The ART of adaptive pattern recognition by a self-organizing neural network . Computer , 21 ( 3 ) : 77 – 88 .
  • Garpenter , G. A. and Grossberg , S. 1990 . ART3: hierarchical search using chemical transmitters in seif-organizing pattern recognition architectures . Neural Networks , 3 : 129 – 152 .
  • Garpenter , G. A. , Grossberg , S. and Rosen , D. B. 1991 . Fuzzy ART: fast stable learning and categorization of analog patterns by an adaptive resonance system . Neural Networks , 4 : 759 – 771 .
  • Kaempf , U. 1995 . The binomial test: a simple tool to identify process problems . IEEE Transactions on Semiconductor Manufacturing , 8 ( 2 ) : 160 – 166 .
  • Mallory , C. L. , Perloff , D. S. , Hasan , T. F. and Stanley , R. M. 1983 . Spatial yield analysis in integrated circuit manufacturing . Solid State Technology , November : 121 – 127 .
  • Mirza , A. I. , Donoghue , G. , Drake , A. W. and Graves , S. C. 1995 . Spatial yield modeling for semiconductor wafers . IEEE/SEMI Advanced Semiconductor Manufacturing Conference , : 276 – 281 .
  • Rao , V. B. and Rao , H. V. 1995 . C++ Neural Networks and Fuzzy Logic New York : MIS Press .
  • Taam , W. and Hamada , M. 1993 . Detect spatial effects from factorial experiments: an application from integrated-circuit manufacturing . Technometrics , 35 ( 2 ) : 149 – 160 .

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