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Original Articles

FEATURE BASED DEFECT MAP PATTERN RECOGNITION AND CLASSIFICATION ALGORITHM

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Pages 17-24 | Received 01 Jan 2002, Accepted 01 Mar 2002, Published online: 15 Feb 2010

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  • Tyagi , A. and Bayoumi , M. A. 1992 . Defect clustering viewed through generalized poisson distribution . IEEE Transactions on Semiconductor Manufacturing , 5 : 196 – 206 .

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