157
Views
2
CrossRef citations to date
0
Altmetric
Original Articles

Aerostatic Thrust Bearing Combining Silicone Restrictor with Flexible Disk under Circumferential Support for High Static Stiffness

, , , &
Pages 31-38 | Received 30 Sep 2014, Accepted 16 Jan 2016, Published online: 06 Jul 2016

References

  • Kwan, Y. B. P. and Post, J. B. (2000), “A Tolerancing Procedure for Inherently Compensated, Rectangular Aerostatic Thrust Bearings,” Tribology International, 33(8), pp 581–585.
  • Mao, J. H. and Li, L. C. (2009), “Design and Implementation of an Active Rectangular Aerostatic Thrust Bearing Stage with Electromagnetic Actuators,” Chinese Science Bulletin, 54(5), pp 858–864.
  • Al-Bender, F. (2009), “On the Modelling of the Dynamic Characteristics of Aerostatic Bearing Films: From Stability Analysis to Active Compensation,” Precision Engineering, 33(2), pp 117–126.
  • Aguirre, G., Al-Bender, F., and Van Brussel, H. (2010), “A Multiphysics Model for Optimizing the Design of Active Aerostatic Thrust Bearings,” Precision Engineering, 34(3), pp 507–515.
  • Aoyama, T., Kakinuma, Y., and Kobayashi, Y. (2006), “Numerical and Experimental Analysis for the Small Vibration of Aerostatic Guideways,” Annals of the CIRP - Manufacturing Technology, 55(1), pp 419–422.
  • Yoshimoto, S. and Kohno, K. (2001), “Static and Dynamic Characteristics of Aerostatic Circular Porous Thrust Bearings (Effect of the Shape of the Air Supply Area),” Journal of Tribology, 123(3), pp 501–508.
  • Belforte, G., Raparelli, T., Viktorov, V., and Trivella, A. (2009), “Metal Woven Wire Cloth Feeding System for Gas Bearings,” Tribology International, 42(4), pp 600–608.
  • Bhat, N., Kumar, S., Tan, W., Narasimhan, R., and Low, T. C. (2012), “Performance of Inherently Compensated Flat Pad Aerostatic Bearings Subject to Dynamic Perturbation Forces,” Precision Engineering, 36(3), pp 399–407.
  • Nishio, U., Somaya, K., and Yoshimoto, S. (2011), “Numerical Calculation and Experimental Verification of Static and Dynamic Characteristics of Aerostatic Thrust Bearings with Small Feedholes,” Tribology International, 44(12), pp 1790–1795.
  • Li, Y. and Ding, H. (2007), “Influences of the Geometrical Parameters of Aerostatic Thrust Bearing with Pocketed Orifice–Type Restrictor on Its Performance,” Tribology International, 40(7), pp 1120–1126.
  • Chen, X. D. and He, X. M. (2006), “The Effect of the Recess Shape on Performance Analysis of the Gas-Lubricated Bearing in Optical Lithography,” Tribology International, 39(11), pp 1336–1341.
  • Guo, Y. H. (2014), Numerical Analysis of Flexible Aerostatic Bearing Combined with Silicone Restrictor, Master's Thesis, National Yunlin University of Science and Technology, Taiwan.

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.