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Radiation Effects and Defects in Solids
Incorporating Plasma Science and Plasma Technology
Volume 166, 2011 - Issue 11
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Original Articles

Effects of W and Mo crystalline texture on the angular distribution of sputtered atoms

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Pages 894-900 | Received 12 Jul 2011, Accepted 18 Jul 2011, Published online: 31 Oct 2011

References

  • Yamamura , Y. , Takiguchi , T. and Tawara , H. 1990 . Data Compilation of Angular Distributions of Sputtered Atoms , 183 Chikusa-ku, Nagoya, , Japan : National Institute for Fusion Science . Report NIFS–DATA–1;
  • Mashkova , E. S. and Molchanov , V. A. 1995 . J. Surf. Invest. X-ray Synch. Neutron Tech. , 3 : 5 – 25 .
  • Mashkova , E. S. and Molchanov , V. A. 1997 . J. Surf. Invest. X-ray Synch. Neutron Tech. , 12 : 73 – 90 .
  • Ekstein , W. 1991 . Computer Simulation of Ion–Solid Interactions , Berlin : Springer .
  • Northcott , L. 1956 . Molybdenum , London : Butterworths Scientific Publications .
  • Arsamasov , B. N. and Mukhin , G. G. 2002 . Material Science , 74 – 76 . Moscow : Textbook for University, Bauman MSTU .
  • Czekaj , D. , Hollman , E. K. , Volpias , V. A. , Zaytsev , A. G. , Chernakova , A. and Goranchev , B. 1991 . Bulg. J. Phys. , 18 : 63 – 67 .
  • Shulga , V. I. 2000 . Nucl. Instrum. Methods B , 164–165 : 733 – 747 .
  • Ziegler , J. F. , Biersack , J. P. and Littmark , U. 1985 . The Stopping and Range of Ions in Solids , Edited by: Ziegler , J. F. , Biersack , J. P. and Littmark , U. Vol. 1 , New York : Pergamon .
  • Robinson , M. T. and Berish , R. 1981 . Sputtering by Particle Bombardment , Vol. 1 , Berlin : Springer .
  • Jackson , D. P. 1974 . Surf. Sci. , 43 : 431 – 440 .
  • Andersen , H. H. and Sigmund , P. 1965 . Nucl. Instrum. Methods , 38 : 238 – 240 .

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