Publication Cover
Radiation Effects and Defects in Solids
Incorporating Plasma Science and Plasma Technology
Volume 158, 2003 - Issue 11-12
26
Views
2
CrossRef citations to date
0
Altmetric
Original Articles

Behavior of implanted hydrogen in thermally stimulated blistering in silicon

Pages 771-781 | Received 24 Jun 2002, Accepted 12 Sep 2002, Published online: 13 May 2010

References

  • Bruel , M. (1999) . Mat. Res. Innovat. , 3 : 9
  • Tong , Q.-Y. , Lee , T.-H. , Huang , L.-J. , Chao , Y.-L. and Gosele , U. (1998) . Electron. Lett. , 34 : 407
  • Tong , Q.-Y. , Gutjahr , K. , Hopfe , S. , Gosele , U. and Lee , T.-H. (1997) . Appl. Phys. Lett. , 70 : 1390
  • Jalaguier , E. , Aspar , B. , Pocas , S. , Michaud , J. F. , Zussy , M. , Papon , A. M. and Bruel , M. (1998) . Electron. Lett. , 34 : 408
  • Simpson , T. W. , Mitchel , I. V. , Este , G. O. and Shepherd , F. R. (1999) . Nucl. Instr. Meth. B. , 148 : 381
  • Thevuthasan , S. , Jiang , W. and Weber , W. J. (2001) . Mater. Lett. , 49 : 313
  • Tong , Q.-Y. , Huang , L.-J. and Gosele , U. M. (2000) . J. Electron. Mater. , 29 : 928
  • Manuaba , A. , Paszti , F. , Ortega , C. , Grosman , A. , Horvath , Z. E. , Szilagyi , E. , Khanh , N. Q. and Vickridge , I. (2001) . Nucl. Instr. Meth. B. , 179 : 63
  • Tokmoldin , S. Zh. and Mukashev , B. N. (2001) . Physica B. , 308–310 : 167
  • Leitch , A. W. R. , Alex , V. and Weber , J. (1998) . Phys. Rev. Lett. , 81 : 421
  • Estreicher , S. K. (1995) . Mater. Sci. Eng. R. , 14 : 319
  • Watkins , G. D. (2000) . Materi. Sci. Semicond. Proc. , 3 : 227
  • Lavrov , E. V. and Weber , J. (2001) . Phys. Rev. Lett. , 87 : 185502
  • Bruel , M. (1996) . Nucl. Instr. Meth. B. , 108 : 313
  • Huang , L.-J. , Tong , Q.-Y. , Chao , Y.-L. , Lee , T.-H. , Martini , T. and Gosele , U. (1999) . Appl. Phys. Lett. , 74 : 982
  • Guseva M. I. Martynenko Yu. V. (1981) Uspekhi Phyzicheskikh Nauk 135 671 (In Russian)
  • Martynenko Yu. V. (1982) In: Shafranov, V. D. (Ed.) Itogi nayki i tekhniki. Fizika plazmi. 3 VINITI Moscow (In Russian)
  • Hara T. Kakizaki Y. Oshima S. Kajiyama K. Inoue M. (1997) The 1997 Joint International Meeting Paris 31 August–05 September 1997, Meeting Abstracts Vol. 97-2 Abs.N.1988 p. 2306
  • Myers , S. M. , Follstaedt , D. M. , Stein , H. J. and Wampler , W. R. (1992) . Phys. Rev. B. , 45 : 3914
  • Stein , H. J. , Myers , S. M. and Follstaedt , D. M. (1992) . J. Appl. Phys. , 73 : 2755
  • Langford , A. A. , Fleet , M. L. , Nelson , B. P. , Lanford , W. A. and Maley , N. (1992) . Phys. Rev. B , 45 : 13367
  • Kucherov A. P. Kochubey S. M. (1983) Zhurnal Prikladnoi Spektroskopii 38 145 (In Russian)
  • Manfredotti , C. , Fizzotti , F. , Boero , M. , Pastorino , P. , Polesello , P. and Vittone , E. (1994) . Phys. Rev. B. , 50 : 18046
  • Aleksandrov , P. A. , Baranova , E. K. , Baranova , I. V. , Budaragin , V. V. and Litvinov , V. L. (1997) . Instruments and Experimental Techniques , 40 : 693
  • Weldon , M. K. , Marsico , V. E. , Chabal , Y. J. , Agarwal , A. , Eaglesham , D. J. , Sapjeta , J. , Brown , W. L. , Jacobson , D. C. , Caudano , Y. , Christman , S. B. and Chaban , E. E. (1997) . J. Vac. Sci. Technol. B. , 15 : 1065
  • Chabal , Y. J. , Weldon , M. K. and Caudano , Y. (1999) . Physica B. , 273–274 : 152
  • Stryahilev , D. , Diehl , F. and Schroder , B. (2000) . J. Non-Cryst. Solids , 266–269 : 166
  • Timoshenko S. Woinowsky-Krieger S. (1959) Theory of Plates and Shells McGraw-Hill New-York
  • Mitani , K. and Gosele , U. M. (1992) . Appl. Phys. A. , 54 : 543
  • Aleksandrov P. A. Baranova E. K. Baranova I. V. Budaragin V. V. Litvinov V. L. (2001) In: Bondarenko, G. G. (Ed.) Proc. of XI International Workshop Radiation Physics of Solids (Ukraine, Sevastopol, June)25-30,2001 NII PMT Moscow p. 351, (In Russian)
  • Tuttle , B. and Adams , J. B. (1998) . Phys. Rev. B. , 57 : 12859
  • Wampler , W. R. , Myers , S. M. and Follstaedt , D. M. (1993) . Phys. Rev. B. , 48 : 4492
  • Grisolia , J. , Cristiano , F. , Ben Assayag , G. and Claverie , A. (2001) . Nucl. Instr. Meth. B. , 178 : 160
  • Gupta , P. , Colvin , V. L. and George , S. M. (1988) . Phys. Rev. B. , 37 : 8234
  • Keinonen , J. , Hautala , M. , Rauhala , E. , Karttunen , V. , Kuronen , A. , Raisanen , J. , Lahtinen , J. , Vehanen , A. , Punkka , E. and Hautojarvi , P. (1988) . Phys. Rev. B. , 37 : 8269

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.