The effect of incidence angle on disorder production in ion implanted Si

References

• Herbot , N. , Appleton , B. R. , Noggle , T. S. , Zuhr , R. A. and Pennycook , S. J. 1986 . Nucl. Instr. Meth. , B13 : 250 – 258 .
   Google Scholar
• Armour , D. G. , Bailey , P. and Sharples , G. 1986 . Vacuum , 36 : 769 – 775 .
   Web of Science ®Google Scholar
• Miyake , K. 1981 . “ Studies on Low Energy, Mass Separated Ion Beam Deposition and Reactive Ion Beam Etching ” . Ph.D. Thesis
   Google Scholar
• Bangert , U. , Goodhew , P. J. , Jeynes , C. and Wilson , I. H. 1986 . J. Phys. D , 19 : 589 – 603 .
   Web of Science ®Google Scholar
• Lang , B. and Taoufik , A. 1986 . Appl. Phys. A , 39 : 95 – 99 .
   Web of Science ®Google Scholar
• Rabinzohn , P. , Gautherin , G. , Agius , B. and Cohen , C. 1984 . J. Electrochem. Soc. , 131 : 905
   Web of Science ®Google Scholar
• Thompson , D. A. , Golanski , A. , Haugen , K. H. , Stevanovic , D. V. , Carter , G. and Christodoulides , C. E. 1980 . Rad. Eff. , 52 : 69 – 84 .
   Web of Science ®Google Scholar
• Winterbon , K. B. 1975 . Ion Implantation Range and Energy Deposition Distribution , Vol. 2 , New York : Plenum, Press .
   Google Scholar
• Kostic , S. and Armour , D. G. Low Energy (300 eV-10 keV) Ar+ and Cl+ Ion Irradiation of (100) Si, NASI Conference Proc. Viana-Portugal .
   Google Scholar
• Furukawa , S. and Matsumara , H. 1973 . Appl. Phys. Lett. , 22 ( No. 3 )
   Web of Science ®Google Scholar
• Grant , W. A. , Williams , J. S. and Dodds , J. 1976 . Rad. Eff. , 29 : 189
   Web of Science ®Google Scholar
• Kostic , S. , Kiriakides , G. , Nobes , M. J. and Carter , G. 1986 . “ The Influence of Incidence Angle on Damage Production in In+ Ion Implanted Si ” . In Erosion and Growth of Solids Stimulated by Atom and Ion Beams , Edited by: Kiriakidis , G. , Carter , G. and Whitton , J. L. Dordrecht : Martinus Nijhoff Pub .
   Google Scholar
• Kostic , S. , Nobes , M. J. , Carter , G. , Davies , J. A. , Stevanovic , D. V. and Thompson , D. A. 1987 . Nucl. Inst. Meth. , B19/20 : 422 – 426 .
   Google Scholar
• Williams , J. S. 1975 . Nucl. Inst. Meth. , 126 : 205
   Web of Science ®Google Scholar
• Bogh , E. 1968 . Can. J. Phys. , 46 : 653
   Web of Science ®Google Scholar
• Mayer , J. W. , Ericksson , L. and Davies , J. A. 1970 . “ Ion Implanatation in Semiconductors, Silicon, and Germanium ” . New York : Academic Press .
   Google Scholar
• Slater , M. , Kostic , S. , Nobes , M. J. and Carter , G. 1985 . Nucl. Inst. Meth. , B7/8 : 429 – 432 .
   Google Scholar
• Carter , G. 1986 . Rad. Eff. , 100 : 281 – 288 .
   Google Scholar
• Al-Hashmi , S. A. R. and Carter , G. 1987 . Rad. Eff. , 102 : 83 – 93 .
   Web of Science ®Google Scholar
• Ahmed , N. A. G. , Christodoulides , C. E. , Carter , G. , Nobes , M. J. and Titov , A. I. 1980 . Nucl. Inst. Meth. , 168 : 283
   Web of Science ®Google Scholar
• Ahmed , N. A. G. , Christodoulides , C. E. and Carter , G. 1980 . Rad. Eff. , 52 : 211
   Web of Science ®Google Scholar
• Kool , W. H. , Roosendaal , H. E. , Wiggers , L. W. and Saris , F. W. H. 1978 . Rad. Eff. , 36 : 41
   Web of Science ®Google Scholar
• Thompson , D. A. , Carter , G. , Haugen , H. K. and Stevanovic , D. V. 1980 . Rad. Eff. , 46 : 71
   Web of Science ®Google Scholar
• Christodoulides , C. E. , Kadhim , N. J. and Carter , G. 1980 . Rad. Eff. , 52 : 225 – 234 .
   Web of Science ®Google Scholar
• Christodoulides , C. E. , Kadhim , N. J. , Carter , G. , Jimenez-Rodriguez , J. J. and Gras-Marti , A. 1981 . Nucl. Inst. Meth. , 191 : 124 – 134 .
   Web of Science ®Google Scholar
• Carter , G. , Webb , R. and Collins , R. 1978 . Rad. Eff. , 37 : 21
   Web of Science ®Google Scholar
• Thompson , D. A. , Walker , R. S. and Davies , J. A. 1977 . Rad. Eff. , 32 : 135
   Web of Science ®Google Scholar
• Thompson , D. A. and Walker , R. S. 1978 . Rad. Eff. , 36 : 91
   Web of Science ®Google Scholar
• Sigmund , P. 1969 . Appl. Phys. Lett. , 14 : 114
   Web of Science ®Google Scholar
• Karpuzov , D. S. Private communication
   Google Scholar
• Jimenez-Rodrigues , J. J. 1977 . “ Thesis ” . Univ. of Madrid . unpublished
   Google Scholar
• 1978 . An. Fis. , 74 ( No. 3 )
   Google Scholar
• Biersack , J. P. Private Communication
   Google Scholar