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Radiation Effects and Defects in Solids
Incorporating Plasma Science and Plasma Technology
Volume 124, 1992 - Issue 2
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Section B: Crystal lattice defects and amorphous materials

Structural evolution of the low energy deuterium-implanted silicon

M. V. Sidorov P. N. Lebedev Physical Institute, Department of Solid State Physics, 53 Leninsky prospect, 117924, Moscow, USSR
,
S. R. Oktyabrsky P. N. Lebedev Physical Institute, Department of Solid State Physics, 53 Leninsky prospect, 117924, Moscow, USSR
,
M. A. Lomidze Institute of Physical Chemistry, 31 Leninsky prospect, 117915, Moscow, USSR
&
A. E. Gorodetsky Institute of Physical Chemistry, 31 Leninsky prospect, 117915, Moscow, USSR
Pages 223-232 | Received 02 Feb 1991, Published online: 19 Aug 2006

References

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  • Cerofolini , G. F. , Meda , L. Volpones , C. 1990 . Phys. Rev. B , 41 ( 18 ) : 12607
  • Lomidze , M. A. , Gorodetsky , A. E. and Zakharov , A. P. 1989 . Poverkhnost , 3 : 55 (In Russian)
  • Lomidze , M. A. , Gorodetsky , A. E. and Zakharov , A. P. 1989 . “ Proc. of 9th All-Union Conf. ” . In Interaction of particles with solid state Vol. 2 , Moscow In Russian
  • Pearcy , P. S. 1984 . Nuc. Instrum. Methods , 182/183 : 337
  • Ligeon , E. and Guevarc'h , A. 1976 . Rad. Effects , 27 : 129
  • Johnson , N. M. Ponce , F. A. 1987 . Phys. Rev. B , 35 ( 8 ) : 4166

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